2022
DOI: 10.1016/j.mssp.2021.106292
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Advanced electrical characterization of AlN/Si based heterogeneous junction for photonic applications

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Cited by 6 publications
(6 citation statements)
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“…To investigate the density and localization of these traps, Charge Deep Level Transient Spectroscopy (Q-DLTS) was employed. This technique estimates the quality and quantity of traps by measuring the transients of trapped charges during electric field interruptions [14,41]. The QDLTS spectra plotted in Fig.…”
Section: Electrical Characterizationmentioning
confidence: 99%
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“…To investigate the density and localization of these traps, Charge Deep Level Transient Spectroscopy (Q-DLTS) was employed. This technique estimates the quality and quantity of traps by measuring the transients of trapped charges during electric field interruptions [14,41]. The QDLTS spectra plotted in Fig.…”
Section: Electrical Characterizationmentioning
confidence: 99%
“…12 at room temperature, show the change in charge (∆Q) as a . This behavior can be described by "( 5)" and "( 8)" [14,41,42].…”
Section: Electrical Characterizationmentioning
confidence: 99%
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“…The melting method is commonly used for producing bulk crystals like polycrystalline silicon ingot, sapphire. However, due to AlN’s extremely high melting point and decomposition pressure as well as the AlN decomposes before melting, melting method is not suitable for growing AlN crystals. Instead, to grow AlN crystals, following growth methods are more practiced: hydride vapor phase epitaxy (HVPE), molecular beam epitaxy (MBE), metal organic vapor deposition (MOCVD) and physical vapor transport (PVT). , HVPE, MBE, and MOCVD are the chief methods intended for growing AlN films.…”
Section: Introductionmentioning
confidence: 99%