Advanced excimer laser technologies enable green semiconductor manufacturing

Fukuda, Hitomi; Yoo, Youngsun; Minegishi, Y.; Hisanaga, Naoto; Enami, Tatsuo

doi:10.1117/12.2054047

Cited by 5 publications

(2 citation statements)

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“…Conversely higher Fresnel number produces sharper edge and smaller variation for the shaped beam profile. Equation (5) shows that if the effective working distance F of the homogenizer has been specified, the Fresnel number is only proportional to the diameter of the microlens unit cell d and the diameter of the shaped beam profile D H . Since D H is also proportional to "d" as discussed previously, the diameter of the microlens unit cell d should be the dominant factor to the Fresnel number.…”

Section: Diffraction Considerationsmentioning

confidence: 99%

“…Excimer lasers are powerful and versatile Lasing sources in the UV range of the electromagnetic spectra. Because of their high pulse energies, high average power, cold ablation and shorter wavelength [1,2], excimer lasers have countless applications, not only in the field of industrial manufacturing [3][4][5], but also in the field of scientific research [6,7] and medical treatment [8,9].…”

Section: Introductionmentioning

confidence: 99%

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Freeform microlens array homogenizer for excimer laser beam shaping

2016

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We presented a novel technique to design microlens optical beam homogenizing system for excimer lasers. As a new approach by applying freeform surface microlens array, the homogenizer can yield somehow superior beam shaping results with larger but less microlens units than conventional method. With new concept and design, the diffraction effects at the microlens apertures can be reduced substantially. Large scale and highly uniform beam profile can be realized at a relative nearby working distance after beam shaping. This is hard to achieve by conventional method. Our design method takes the real spatial energy characteristics of the excimer laser beam as the design basis, and combined with feasible optimization method. The design method is demonstrated as a real instance based, on a 193 nm ArF excimer laser in our laboratory. Moreover, to verify the effectiveness of our method, the designed freeform microlens array homogenizer has been fabricated and tested experimentally. The experimental optical performance of the homogenizer coincides well with the theoretical simulation.

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Section: Diffraction Considerationsmentioning

confidence: 99%