2016
DOI: 10.3390/photonics3020026
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Advanced Fabrication of Single-Mode and Multi-Wavelength MIR-QCLs

Abstract: Abstract:In this article we present our latest work on the optimization of mid-infrared quantum cascade laser fabrication techniques. Our efforts are focused on low dissipation devices, broad-area high-power photonic crystal lasers, as well as multi-wavelength devices realized either as arrays or multi-section distributed feedback (DFB) devices. We summarize our latest achievements and update them with our most recent results.

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Cited by 22 publications
(18 citation statements)
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“…The NDFB QCLs are fabricated following an inverted buried hetero-structure protocol [26,27] Fig. 1b a microscope image of the DFB etching result is shown.…”
Section: Device Fabricationmentioning
confidence: 99%
See 1 more Smart Citation
“…The NDFB QCLs are fabricated following an inverted buried hetero-structure protocol [26,27] Fig. 1b a microscope image of the DFB etching result is shown.…”
Section: Device Fabricationmentioning
confidence: 99%
“…The dual-wavelength Vernier DFB QCLs are fabricated following an inverted buried hetero-structure protocol [26,27], using the same active region as described in Sect. 3 and the same with procedure and parameters as in Sect.…”
Section: Device Fabricationmentioning
confidence: 99%
“…With respect to photonics, many efforts have been made to design multi-wavelength QCL solutions. [6][7][8] Such approaches a) Author to whom correspondence should be addressed: bela.tuzson@ empa.ch significantly reduce the amount of optical elements that are otherwise needed for beam combination. 9 Other considerable elements limiting mobile sensing applications are related to the laser driving and signal processing.…”
Section: Introductionmentioning
confidence: 99%
“…These are realized with electrically tunable DFB devices or arrays of DFB devices. A detailed description of design, fabrication, and performance of the various solutions is given in recent reviews [12][13][14] and references therein.…”
Section: Introductionmentioning
confidence: 99%