Emission of submicron and nanoparticles by industrial processes, like coal or biomass combustion, solid waste incineration, cement kiln heating, and glass production is a serious environmental problem. The application of most effective bag filters is limited due to very high temperature of the exhaust gases from most of these processes, sometimes >1000 K, which the filter material cannot resists. Cyclones, which could be resistant to these temperatures, are not effective for PM2.5 particles removal, which are the most abundant in these processes. Electrostatic precipitators remove dust from flue gases with high mass collection efficiency, but in submicron range (~100 nm to 1 μm) the so called “penetration window” occurs, in which the fractional collection efficiency decreases even below 50% at minimum. Hybrid electrostatic filtration systems, which combines various conventional gas-cleaning devices were therefore proposed and tested in several research papers, in order to improve the overall collection efficiency of the precipitation processes. The heart in all of these devices is an electrostatic particle charger, which can be a conventional electrostatic precipitator, a corona-discharge particle precharger, or electrostatic particle agglomerator. After charging and/or agglomeration, the particles can be further removed by other devices like cyclones, electrostatic precipitators, or bag filters (after gas cooling to an allowable temperature). The paper reviews specific problems encountered in exhaust gas cleaning from various industrial processes, and the most interesting constructions designed for this goal. In particular, an example of a system comprising a unipolar electrostatic agglomerator, which simultaneously charges the particles and agglomerates them in alternating electric field, for the formation of aggregates of finer particles (PM1) with larger species, which could be removed by any conventional gas cleaning device, with sufficiently high collection efficiency, has been discussed in details.