Advanced silicon photonics technology platform leveraging a semiconductor supply chain

Dobbelaere, P. De; Dahl, A.; Mekis, Attila; Chase, Brian; Weber, Benjamin; Welch, B.; Foltz, D.; Armijo, G.; Masini, G.; McGee, G.; Wong, G.; Balardeta, J.; Dotson, Jessie L.; Schramm, J.; Hon, K.Y.; Khauv, K.; Robertson, K.; Stechschulte, K.; Yokoyama, K.; Planchon, L.; Tullgren, L.; Eker, M.; Mack, M.; Peterson, Mark; Rudnick, N.; Milton, P.; Sun, Peng; Bruck, Roman; Zhou, R.; Denton, S.; Fathpour, Sasan; Gloeckner, S.; Jackson, S.; Pang, S.; Sahni, S.; Wang, S.; Yu, S.; Pinguet, Thierry; Koninck, Yannick De; Chi, Y.; Liang, Yi

doi:10.1109/iedm.2017.8268493

Cited by 26 publications

(21 citation statements)

References 5 publications

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“…Due to the potential compatibility of silicon photonics with the well-established industrialization methodologies used in CMOS technologies, there has been a significant thrust for monolithic integration of silicon photonics with electronics [85]. The additional parasitic capacitance and inductance of wirebonds or micro-bumps used by the hybrid electronic-photonic integrated circuit (EPIC) platforms [86]- [89] is minimized by Front-end-of-line (FEOL) integration of photonic components with electronics [30], [90]. Monolithic EPICs have a potential to meet the stringent power dissipation and aggregate throughput demands for short-to-long-range photonic interconnects [30], [44], [90].…”

Section: B Monolithic Silicon Photonics-electronics Co-integrationmentioning

confidence: 99%

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

et al. 2018

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Silicon Photonics is widely acknowledged as a gamechanging technology, driven by the needs of datacom and telecom. Silicon Photonics builds on highly capital-intensive manufacturing infrastructure, and mature open-access silicon photonics platforms are translating the technology from research fabs to industrial manufacturing levels. To meet the current market demands for silicon photonics manufacturing, a variety of openaccess platforms is offered by CMOS pilot lines, R&D institutes and commercial foundries. This paper presents an overview of existing and upcoming commercial and non-commercial openaccess silicon photonics technology platforms. We also discuss the diversity in these open-access platforms and their key differentiators.

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Section: B Monolithic Silicon Photonics-electronics Co-integrationmentioning

confidence: 99%

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

et al. 2018

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“…Flip-chip packaging capability is required for high-performance applications such as 400G optical transceivers, mid-board modules and co-packaging with the SoC. Solving this problem demands the development of silicon photonics platform with TSVs [5].…”

Section: Nmos F T (Ghz)mentioning

confidence: 99%

“…The issues with limited transistor performance and process qualification/availability recently have taken the manufacturers in a different direction. Both STMicroelectronics and TSMC have demonstrated hybrid integration of CMOS with Luxtera's photonic technology implemented in standalone photonic SOI wafers [5,6]. This approach decouples the transistor process development from the photonic process development and is seemingly very attractive since it allows the latest node CMOS circuitry to be used in conjunction with optimized photonic devices.…”

Section: Introductionmentioning

confidence: 99%

“…First, the micro-bumps used to connect the chip with transistors to the chip with photonic devices have limited scaling pitch (to about 40-50 µm) and parasitic capacitances larger than 20 fF, which significantly impacts the speed and energy-efficiency of photonic interconnects. Second, this connectivity arrangement limits the integration scenarios of photonics to 100G pluggable transceivers applications [5]. To enable larger density and quality of electrical connections to the transceiver circuit chip, such as those needed in 400G pluggable and mid-board optics scenarios, the photonic process has to be modified to add through-silicon-via (TSV) technology, further complicating the process and qualification.…”

Section: Introductionmentioning

confidence: 99%

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Monolithic silicon-photonic platforms in state-of-the-art CMOS SOI processes [Invited]

Stojanović¹,

Ram²,

Popović³

et al. 2018

Opt. Express

197

104

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Integrating photonics with advanced electronics leverages transistor performance, process fidelity and package integration, to enable a new class of systems-on-a-chip for a variety of applications ranging from computing and communications to sensing and imaging. Monolithic silicon photonics is a promising solution to meet the energy efficiency, sensitivity, and cost requirements of these applications. In this review paper, we take a comprehensive view of the performance of the silicon-photonic technologies developed to date for photonic interconnect applications. We also present the latest performance and results of our "zero-change" silicon photonics platforms in 45 nm and 32 nm SOI CMOS. The results indicate that the 45 nm and 32 nm processes provide a "sweet-spot" for adding photonic capability and enhancing integrated system applications beyond the Moore-scaling, while being able to offload major communication tasks from more deeply-scaled compute and memory chips without complicated 3D integration approaches.

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“…In some cases, CMOS pilot lines provide low-and medium-volume manufacturing of silicon PICs, typically up to several hundred wafers per order. With the growing industrial interest in high-volume manufacturing of silicon photonics products for telecommunication/datacommunication applications, which is the biggest driver for this technology since its inception, pure-play fabs have started developing open-access silicon photonics technologies [21]. In certain cases, the CMOS pilot lines and research institutes partner with pure-play CMOS fabs for the seamless translation from prototyping towards high-volume manufacturing [22].…”

Section: Introductionmentioning

confidence: 99%

Open-Access Silicon Photonics Platforms in Europe

Rahim

Goyvaerts

Szelag

et al. 2019

IEEE J. Select. Topics Quantum Electron.

107

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Offering open-access silicon photonics-based technologies has played a pivotal role in unleashing this technology from research laboratories to industry. Fabless enterprises rely on the open-access of these technologies for their product development. In the last decade, a diverse set of open-access technologies with medium and high technology readiness levels have emerged. This paper provides a review of the open-access silicon and silicon nitride photonic IC technologies offered by the pilot lines of European research institutes and companies. The

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Advanced silicon photonics technology platform leveraging a semiconductor supply chain

Cited by 26 publications

References 5 publications

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

Monolithic silicon-photonic platforms in state-of-the-art CMOS SOI processes [Invited]

Open-Access Silicon Photonics Platforms in Europe

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