Advanced unconventional techniques for sub‐100 nm nanopatterning

Guo, Mengmeng; Qu, Zhiyuan; Min, Fanyi; Li, Zheng; Qiao, Yali; Song, Yanlin

doi:10.1002/inf2.12323

Cited by 12 publications

(8 citation statements)

References 174 publications

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“…Hence, it is necessary to develop large-area fabrication and mass-production methods to replace their traditional counterparts. Therefore, several alternative techniques [179,[242][243][244], such as two/multi-photon lithography and nanoimprinting lithography (NIL) [245][246][247] have been proposed to address these problems, of which high-precise nanoimprinting can easily transfer predesigned large-scale patterns to the resist layer, as in lithography, with enormous potential for low-cost, large-sized solar concentrator fabrication.…”

Section: Discussionmentioning

confidence: 99%

Planar metasurface-based concentrators for solar energy harvest: from theory to engineering

et al. 2022

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Solar energy is an inexhaustible renewable energy resource, which is a potential solution to global warming and aids sustainable development. The use of solar-thermal collectors to harness solar energy facilitates low-cost heat storage and can improve the stability of power grids based on renewable energy. In solar-thermal collectors, traditional concentrators, such as parabolic troughs and dishes, are typically used but inevitably require high-precise supports and complex tracking sun systems, which increase the cost of solar-thermal power stations and hinder their further applications. In contrast, planar meta-lenses (so-called metasurface-based concentrators) consisting of two-dimensional nanostructured arrays are allowed to engineer the frequency dispersion and angular dispersion of the incident light through delicately arranging the aperture phase distribution, thereby correcting their inherent aberrations. Accordingly, the novel meta-lenses offer tremendous potentials to effectively capture broadband, wide-angle sunlight without the extra tracking system. This review summarizes the research motivation, design principles, building materials, and large-area fabrication methods of meta-lens for solar energy harvesting in terms of focusing efficiency, operation bandwidth, and angular dependence. In addition, the main challenges and future goals are examined.

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Section: Discussionmentioning

confidence: 99%

Planar metasurface-based concentrators for solar energy harvest: from theory to engineering

et al. 2022

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“…The feature size, and therefore the resolution of the patterning, depends on the surface pattern of the mold. Such molds can be produced either by direct patterning of rigid materials, such as silicon or quartz, via electron-beam-or ion-beam-lithography, or via indirect patterning by double replication of hard masters, using heat-softened materials [40].…”

Section: Nanoimprint Lithography (Nil)mentioning

confidence: 99%

Applications of soft biomaterials based on organic and hybrid thin films deposited from the vapor phase

Marcelja,

Demelius,

Ali

et al. 2023

J. Phys. Mater.

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Soft biomaterials are a crucial component in several application fields. They are used, for example, in biomedical implants, biosensors, drug delivery systems as well as in tissue engineering. In parallel to extensive ongoing efforts to synthesize new materials, the development of means to tailor the materials’ surface properties and thus their interaction with the environment is an important field of research. This has led to the emergence of several surface modification techniques that enable the exploitation of the modified materials in a broader range of technologies. In particular, the use of functional thin films can enable a plethora of biomedical applications, that benefit from the bulk properties of the substrate (e.g., flexibility, lightweight, structural strength) combined to the surface properties of the thin film (e.g, enhancing/prevention cell proliferation, controlled drug release). In addition, for some biomedical applications, the thin films can be the main functional components, e.g. in biosensors. The present review focuses on recent developments in the applications of soft biomaterials based on thin films deposited from the vapor phase. In the field of soft biomaterials, the possibility of depositing from the vapor phase - without the need for any solvents - offers the unprecedent benefit that no toxic leachables are included in the biomaterial. Further, due to the complete lack of solvents, and chemicals overall being used in small quantities only, depositing thin films from the vapor phase can be a more sustainable choice than other techniques that are commonly used.

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“…In addition to superconductors, fabricating nanoholes offers great potential to modulate other quantum materials. As the progress of sub-100 nm nanopatterning techniques, [461] especially when the hole period further reduces below 40 nm, the periodic hole array begins to change the band structure of the graphene via quantum confinement. [462,463] As the regular periodic array turns into a conformal hole array, the induced gradient distribution significantly breaks in-plane inversion symmetry, which results in a giant superconducting diode effect in the amorphous MoGe films.…”

Section: Top-down Routementioning

confidence: 99%

Modulations in Superconductors: Probes of Underlying Physics

et al. 2023

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development of various modulations techniques, breakthroughs in quantum materials are achieved, such as the quantum anomalous Hall effect (AHE) in topological insulators, [1][2][3][4] gate-tuned roomtemperature ferromagnetism in 2D van der Waals materials, [5][6][7][8] and emergent magnetic monopoles in artificial spin ice. [9] Especially, as the quantum materials of particular interest with zero dissipation, superconductors have been intensively studied with advanced modulations, aiming to reveal a plethora of emergent phenomena in condensed matter physics, such as superconductor-to-insulator transitions (SIT), [10][11][12] intermediate bosonic metallic state, [13] Bose-Einstein condensation (BEC)-Bardeen-Cooper-Schrieffer (BCS) crossover, [14,15] and intertwined orders, [16][17][18] as well as to develop applications in quantum computing [19][20][21] and ultrasensitive detections. [22][23][24] The superconductivity composes of two ingredients, including the Cooper pairs, each formed by two electrons, and phase coherence among Cooper pairs. [25] Superconductors such as metals and alloys are in the weak-coupling regime, which is well understood by BCS theory. [26,27] However, the later discovered superconductors, including cuprates, iron-based superconductors, and heavy-fermion superconductors, are strongly correlated systems, where a widely accepted microscopic mechanism yet remains absent. Therefore, various modulations have been utilized for the ultimate understanding of these superconductors and routines for room temperature superconductivity. Traditional modulations, such as elemental substitution, annealing, and polarization-induced gating are usually accompanied by some severe problems, including discontinuity, disorders, and limited ranges. Recently, state-of-the-art techniques have been developed with improved convenience, increased capability, and unprecedented dimensionalities, enabling more thorough investigations of unconventional superconductors.As a manifestation, we take some examples discussed in this review in advance. The carrier density can be tuned more conveniently and continuously. The techniques of ionic field-effect transistor (iFET) and electric double-layer transistor (EDLT) surpass conventional methods limited by solid solubility or dielectric breakdown, which enables the more precise phase diagram and detailed scaling analysis at the quantum phaseThe importance of modulations is elevated to an unprecedented level, due to the delicate conditions required to bring out exotic phenomena in quantum materials, such as topological materials, magnetic materials, and superconductors. Recently, state-of-the-art modulation techniques in material science, such as electric-double-layer transistor, piezoelectric-based strain apparatus, angle twisting, and nanofabrication, have been utilized in superconductors. They not only efficiently increase the tuning capability to the broader ranges but also extend the tuning dimensionality to unprecedented degrees of freedom, including quantum fluctuations of...

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Advanced unconventional techniques for sub‐100 nm nanopatterning

Cited by 12 publications

References 174 publications

Planar metasurface-based concentrators for solar energy harvest: from theory to engineering

Planar metasurface-based concentrators for solar energy harvest: from theory to engineering

Applications of soft biomaterials based on organic and hybrid thin films deposited from the vapor phase

Modulations in Superconductors: Probes of Underlying Physics

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