Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays

Bruinink, C.M.; Jaganatharaja, R.K.; Boer, Meint J. de; Berenschot, J.W.; Kolster, M.L.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Krijnen, Gijs

doi:10.1109/memsys.2009.4805341

Cited by 48 publications

(61 citation statements)

References 8 publications

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“…The fabrication process for the biomimetic accelerometer is based upon the process for cricket-inspired biomimetic hair flow sensors, previously developed in our group [19,20]. A schematic overview of the biomimetic accelerometer with the materials indicated is shown in figure 3a.…”

Section: Fabricationmentioning

confidence: 99%

A biomimetic accelerometer inspired by the cricket's clavate hair

Droogendijk

Boer

Sanders

et al. 2014

J. R. Soc. Interface.

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Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. An analytical model is presented for the design of the accelerometer, and guidelines are derived to reduce responsivity due to flow-induced contributions to the accelerometer's output. Measurements show that this microelectromechanical systems (MEMS) hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 ms 22 and a dynamic range of more than 35 dB.The accelerometer exhibits a clear directional response to external accelerations and a low responsivity to airflow. Further, the accelerometer's physical limits with respect to noise levels are addressed and the possibility for short-term adaptation of the sensor to the environment is discussed.

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Section: Fabricationmentioning

confidence: 99%

A biomimetic accelerometer inspired by the cricket's clavate hair

Droogendijk

Boer

Sanders

et al. 2014

J. R. Soc. Interface.

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“…In our MEMS hair-flow sensory system, which is fabricated as described by Bruinink et al [13], the torsional stiffness is controlled using a bias voltage on the sensor membrane electrodes ( Figure 3). By symmetrically supplying voltages to the electrodes of the sensor, the electrostatic transduction nature of the system is exploited to obtain ESS, without actually mechanically driving the sensor.…”

Section: Theory and Modelingmentioning

confidence: 99%

“…Improvement of fabrication methodologies has led to better performance (Figure 2), making it possible to detect and measure flow velocities in the range of sub-mm/s while retaining a bandwidth on the order of 1 kHz [13]. Furthermore, we have demonstrated the use of arrays of hair-sensors [14] and shown their potential for the ultimate development of a flow camera inspired by the cerci of crickets [15].…”

Section: Introductionmentioning

confidence: 97%

Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors

et al. 2013

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Abstract:We present an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DCbias voltage to our capacitive flow sensors improves the responsivity by up to 80% for flow signals at frequencies below the sensor's resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.

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“…Previously, we have shown advancements in the design and fabrication of flow-sensitive hair-sensors by making high-density hair arrays [6,7] as shown in Figure 2. Averaging the signals of a group of hairs was used to increase the SNR (i.e.…”

Section: Fabricationmentioning

confidence: 99%

Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

Dagamseh

Lammerink

Sanders

et al. 2011

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems

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Next to image sensors, future's robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.

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Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays

Cited by 48 publications

References 8 publications

A biomimetic accelerometer inspired by the cricket's clavate hair

A biomimetic accelerometer inspired by the cricket's clavate hair

Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors

Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

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