Advances in DUV light source sustainability

Roman, Yzzer; Kanawade, Dinesh; Gillespie, Walt; Luo, Siqi; Thever, Mark; Duffey, T. P.; O’Brien, Kevin; Ahlawat, Rahul; Dorobantu, Andrei; Gross, Eric R.; Mason, Erik

doi:10.1117/12.2260307

Cited by 2 publications

(1 citation statement)

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“…We also want to address the problems that arise when fabricating the structure. The state-of-art focused ion-beam milling technique or the deep UV photolithography technique can be used to manufacture our lens; however, it is still challenging [37], [38]. First, to reduce the difficulty of the process, the lens can be designed with a longer wavelength, or the period can be increased.…”

Section: Results From Designed Lensmentioning

confidence: 99%

Sub-Wavelength Slit-Assisted Binary Metallic Lens Design for Effective Multifocusing via Phase Superposition Method

Park¹,

Kim

2020

IEEE Access

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This paper proposes a multifocal lens design method named phase superposition method (PSM) and a methodology to increase the efficiency of metallic binary zone plates through a sub-wavelength slit array. The phase superposition method calculates the intensity at each focus, assuming a perfectly phasematched modulation based on input light, and the size of the lens. Subsequently, based on the calculated focus intensity, the phases linearly related to the target intensity at each focus are combined. The subwavelength slit-assisted metallic binary plate assumes the sub-wavelength slit array as a dielectric in the light polarized perpendicular to the slit. It then controls the condition of the slit to invert the phase difference between the opened region and the slit region. By applying these methods, the trifocal lens was designed to verify our idea. The light was focused on three target positions. After applying the sub-wavelength slit structure, the amplitude was increased up to 90.11%, and the efficiency increase was 303.99% compared to that of a binary plate without the sub-wavelength slit.

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Section: Results From Designed Lensmentioning

confidence: 99%