Advances in EELS Instrumentation: A New Design High-Vacuum Parallel EELS System

Twesten, RD; Trevor, CG; Barfels, M; Sato, Yasuhisa; Menon, N; Thomas, Paul J.; Gubbens, A.J.

doi:10.1017/s1431927611006714

Microsc Microanal

2011

DOI: 10.1017/s1431927611006714

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Advances in EELS Instrumentation: A New Design High-Vacuum Parallel EELS System

RD Twesten

CG Trevor

M Barfels

et al.

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

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Recent developments in high energy-resolution electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM) have brought about renewed interest in optimizing the performance of the spectrometers [1][2][3]. Apart from further improvement of instrumental stabilities, minimization of the spectrometer aberrations (including high-order ones) have become demanding.

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Automatic and Quantitative Measurement of Spectrometer Aberrations in Monochromated EELS

Guo

Lupini

2022

Microscopy and Microanalysis

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confidence: 99%

Automatic and Quantitative Measurement of Spectrometer Aberrations in Monochromated EELS

Guo

Lupini

2022

Microscopy and Microanalysis

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Automatic and Quantitative Measurement of Spectrometer Aberrations

Guo,

Lupini

2023

Microscopy and Microanalysis

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The performance of electron energy loss spectrometers can often be limited by their electron optical aberrations. Due to recent developments in high energy resolution and momentum-resolved electron energy loss spectroscopy (EELS), there is renewed interest in optimizing the performance of such spectrometers. For example, the “ω − q” mode of momentum-resolved EELS, which uses a small convergence angle and requires aligning diffraction spots with the slot aperture, presents a challenge in the realignments of the spectrometer required by the adjustment of the projection lenses. Automated and robust alignment can greatly benefit such a process. The first step toward this goal is automatic and quantitative measurement of spectrometer aberrations. We demonstrate the measurement of geometric aberrations and distortions in EELS within a monochromated scanning transmission electron microscope (STEM). To better understand the results, we present a wave mechanical simulation of the experiment. Using the measured aberration and distortion coefficients as inputs to the simulation, we find a good match between the simulation and experiment, verifying formulae used in the simulation. From verified simulations with known aberration coefficients, we can assess the accuracy of measurements. Understanding the errors and inaccuracies in the procedure can guide further progress in aberration measurement and correction for new spectrometer developments.

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Advances in EELS Instrumentation: A New Design High-Vacuum Parallel EELS System

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Cited by 2 publications

References 0 publications

Automatic and Quantitative Measurement of Spectrometer Aberrations in Monochromated EELS

Automatic and Quantitative Measurement of Spectrometer Aberrations in Monochromated EELS

Automatic and Quantitative Measurement of Spectrometer Aberrations

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