2011
DOI: 10.3390/s111211871
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Advances in SAW Gas Sensors Based on the Condensate-Adsorption Effect

Abstract: A surface-acoustic-wave (SAW) gas sensor with a low detection limit and fast response for volatile organic compounds (VOCs) based on the condensate-adsorption effect detection is developed. In this sensor a gas chromatography (GC) column acts as the separator element and a dual-resonator oscillator acts as the detector element. Regarding the surface effective permittivity method, the response mechanism analysis, which relates the condensate-adsorption effect, is performed, leading to the sensor performance pre… Show more

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Cited by 27 publications
(14 citation statements)
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“…Metal oxides, such as SnO 2 , CuO, Cr 2 O 3 , V 2 O 5 , WO 3 and TiO 2 , can be utilized to detect combustible, reducing, or oxidizing gases with sensors which are mainly based on the resistance change responses to the target gases [119]. Tin dioxide (SnO 2 ) is the commonly used gas sensing material.…”
Section: Metal Oxide Semiconductormentioning
confidence: 99%
“…Metal oxides, such as SnO 2 , CuO, Cr 2 O 3 , V 2 O 5 , WO 3 and TiO 2 , can be utilized to detect combustible, reducing, or oxidizing gases with sensors which are mainly based on the resistance change responses to the target gases [119]. Tin dioxide (SnO 2 ) is the commonly used gas sensing material.…”
Section: Metal Oxide Semiconductormentioning
confidence: 99%
“…The schematic of the resonator structure is shown in Figure 9, which consists of three interdigital transducers (IDTs) and two identical shorted grating reflectors [24].…”
Section: Pm 25 Mass Detectionmentioning
confidence: 99%
“…The schematic of the resonator structure is shown in Figure 9, which consists of three interdigital transducers (IDTs) and two identical shorted grating reflectors [24]. Prior to the fabrication of the SAW sensor chip, the design parameters of the SAW resonator are determined by using the COM model [25].…”
Section: Pm25 Mass Detectionmentioning
confidence: 99%
“…Different methods such as chromatography [ 13 ], spectrophotometry [ 14 ], differential optical absorption spectroscopy (DOAS), Fourier transform infrared absorption, and laser induced fluorescence spectroscopy (LIFS), have been developed for monitoring formaldehyde. For small-size and real-time monitoring devices, in addition, many microscale gaseous formaldehyde detection systems [ 15 ] and various metal oxide semiconductor materials, such as SnO 2 [ 16 , 17 , 18 ], doped ZnO [ 19 , 20 , 21 ], CdO/In 2 O 3 [ 22 ], and nanostructured materials [ 23 ] were also investigated.…”
Section: Introductionmentioning
confidence: 99%