Advances in source technology for focused ion beam instruments

Smith, Noel S.; Notte, John; Steele, Adam V.

doi:10.1557/mrs.2014.53

Cited by 46 publications

(20 citation statements)

References 17 publications

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“…Continuous developments in the ions source technology have provided several other alternative ion species for FIB operations. 78 Inductive coupled plasma ion source can provide ions of xenon (Xe + ), helium (He − ), and oxygen (O 2+ , O − ). It is possible to get the ions-beam current ranging from a few pA to several mA.…”

Section: Focused Ion Beam: Technology and Applicationsmentioning

confidence: 99%

Micromachining: An overview (Part I)

Jain

Balasubramaniam

Mote

et al. 2020

Journal of Micromanufacturing

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This article gives classification of micromanufacturing in general and micromachining processes in particular. For different micromachining processes, one can have different kinds of operations through which different features, shapes, accuracy, precision, and dimensions can be achieved. This article as Part I reports an overview of only three processes as diamond turn machining (a class of traditional micromachining processes), electrochemical micromachining, and focused-ion-beam micromachining (a class of advanced micromachining processes). About all these three processes, a brief introduction to the mechanisms of material removal is reported followed by the new developments in each process which are discussed independently. In various sections, some areas where research work needs to be done are identified and very briefly discussed.

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Section: Focused Ion Beam: Technology and Applicationsmentioning

confidence: 99%

Micromachining: An overview (Part I)

Jain

Balasubramaniam

Mote

et al. 2020

Journal of Micromanufacturing

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“…The problem of scale relating to the traditional FIB-SEM with gallium (Ga) ion milling (e.g., sample volumes in the order of ~10 × 10 × 10 μm 3 ) is now being confronted, which makes the FIB-SEM analysis more qualitative than quantitative. Newly emerging techniques such as the FIB with an inductively coupled plasma ion source (plasma-FIB) (e.g., Smith et al 2014) and X-ray microscopy (XRM) or nano-CT (e.g., Gelb et al 2011) will enable us to overcome sample size limitations and to characterize multi-scale hierarchical pore topology.…”

Section: Three-dimensional Characterization Of Pore Topologymentioning

confidence: 99%

Lattice Boltzmann-Based Approaches for Pore-Scale Reactive Transport

Yoon

Kang

Valocchi

2015

Reviews in Mineralogy and Geochemistry

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“…In the past few years, much interest has turned to development of different FIB sources for applications with different ions and varying ion beam currents (Smith et al, 2014). Giannuzzi & Smith (2011), and later Delobbe et al (2014) used the Xe + plasma focused ion beam (PFIB) to create electron transparent S/TEM specimens.…”

Section: Site Specific Plasma Fib Specimen Preparationmentioning

confidence: 99%

Theory and New Applications ofEx SituLift Out

Giannuzzi¹,

Yin

et al. 2015

Microsc Microanal

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The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.

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Advances in source technology for focused ion beam instruments

Abstract: Abstract

Cited by 46 publications

References 17 publications

Micromachining: An overview (Part I)

Micromachining: An overview (Part I)

Lattice Boltzmann-Based Approaches for Pore-Scale Reactive Transport

Theory and New Applications ofEx SituLift Out

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