Advances in Thermoelastic Damping in Micro- and Nano- Mechanical Resonators: a Review

Fang, Daining; Sun, Yuxin; Soh, Ai Kah

doi:10.1299/jmmp.1.18

Cited by 11 publications

(5 citation statements)

References 62 publications

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“…184,185,186,187 Both extrinsic and intrinsic dissipation mechanisms can exist in NEMS resonators. 188 Extrinsic dissipation sources can include air/fluid damping, 189 clamping loss, etc., while intrinsic dissipation mechanisms can include phonons in the resonator and the clamps, 190 surface-induced loss, 191,192,193 material-defect-induced dissipation, 194,195 thermoelastic damping, 196,197 etc. Both of these need to be optimized to achieve high-Q resonators.…”

Section: Quality Factor and Dampingmentioning

confidence: 99%

Nanomechanical Resonators: Toward Atomic Scale

Zhang

Zhu

et al. 2022

ACS Nano

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The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to new grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including onedimensional (1D) nanowires/nanotubes, and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained efforts have been devoted to creating mechanical devices toward the ultimate limit of miniaturization-genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-toatomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.

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Section: Quality Factor and Dampingmentioning

confidence: 99%

Nanomechanical Resonators: Toward Atomic Scale

Zhang

Zhu

et al. 2022

ACS Nano

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“…Many authors have studied the vibration and heat transfer process of beams (Fang et al, 2007). The field equations for coupled thermoelastic vibration of Rayleigh and Timoshenko beams have been derived by Jones (1966).…”

Section: Introductionmentioning

confidence: 99%

Laser-induced vibrations of micro-beams under different boundary conditions

Sun

Fang

Saka

et al. 2008

International Journal of Solids and Structures

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118

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In this study, the vibration phenomenon during pulsed laser heating of a micro-beam is investigated. The beam is made of silicon and is heated by a non-Gaussian laser beam with a pulse duration of 2 ps, which incites vibration due to the thermoelastic damping effect. The coupling between the temperature field and stress field induces energy dissipation and converts mechanical energy into heat energy, which is irreversible. An analytical-numerical technique based on the Laplace transform is used to calculate the vibration of the deflection and thermal moment. A general algorithm of the inverse Laplace transform is developed. The validation of this algorithm is obtained through comparison with numerical results obtained by the FEMLAB software package. The effect of laser pulse energy absorption depth is studied. The size effect and the effect of different boundary conditions are also analyzed. Finally, the damping ratio and resonant frequency shift ratio of beams due to the air damping effect and the thermoelastic damping effect are compared.

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“…The field equations for coupled thermoelastic vibration of Rayleigh and Timoshenko beams have been derived by Jones [1966]. Many authors have studied the vibration and heat transfer process of beams [Kidawa-Kukla 1997;2003;Fang et al 2007].…”

Section: Introductionmentioning

confidence: 99%

A two-dimensional problem in magnetothermoelasticity with laser pulse under different boundary conditions

Deswal¹,

Sheoran²,

Kalkal³

2013

J. Mech. Mater. Struct.

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This paper is concerned with the study of vibrations induced by a laser beam in the context of generalized magnetothermoelasticity. The basic governing equations for isotropic and homogeneous elastic solids are formulated under Green-Naghdi theory in the x-z plane. The temporal profile of the laser beam is considered as non-Gaussian. The governing nondimensional equations are solved using normal mode analysis. The obtained solution is then applied to two specific problems in the half-space, where the boundary is subjected to either a mechanical or thermal load. Numerical computations are performed for a specific model to calculate the displacement, temperature, and stress fields and the results are displayed. The effects of time and magnetic field on the variation of different field quantities are analyzed in the figures.

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Advances in Thermoelastic Damping in Micro- and Nano- Mechanical Resonators: a Review

Cited by 11 publications

References 62 publications

Nanomechanical Resonators: Toward Atomic Scale

Nanomechanical Resonators: Toward Atomic Scale

Laser-induced vibrations of micro-beams under different boundary conditions

A two-dimensional problem in magnetothermoelasticity with laser pulse under different boundary conditions

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