Advantage of dual-confined plasmas over conventional and facing-target plasmas for improving transparent-conductive properties in Al doped ZnO thin films

Electrical Study of Trapped Charges in Copper-Doped Zinc Oxide Films by Scanning Probe Microscopy for Nonvolatile Memory Applications

“…Kumar et al . [ 7 , 8 ] reported tailoring of extrinsic dopants provide interesting enhancement in electronic transport properties of ZnO films. It is well known that copper atoms in zinc oxide are electron traps.…”

Al-Sn doped ZnO thin film nanosensor for monitoring NO2 concentration

“…When the ZnO nanorods are sputter-coated with Pd or Pt, the sensitivity is increased by a factor of 5, and these sensors can detect H 2 down to concentrations of 10 ppm at 25 • C [27]. The transparent, conductive nature of the ZnO thin films, essential for gas sensor fabrication, is greatly enhanced by doping it with Al [28]. Therefore, carrier mobility and concentration can be drastically increased by the addition of Al as a dopant [29].…”

Effect of Annealing Temperature on Optoelectronic Performance of F- and Al-codoped ZnO Thin Films for Photosensor Applications

“…For example, the addition of group III elements such as B, Al, Ga, and In to ZnO-based TCOs improves both the conductivity of the thin film and the optoelectronic performance. (17)(18)(19) To achieve good transmittance in the visible light range, the energy bandgap of TCO thin films must be greater than the energy of visible light (i.e., 3.0 eV). The literature contains extensive studies on the properties of doped TCO thin films, including indium tin oxide (ITO), (20,21) fluorine-doped tin oxide (FTO), (22,23) aluminum-doped zinc oxide (AZO), (24,25) titanium-codoped ZnO, (26) and gallium-doped zinc oxide (GZO).…”