Aerosol and plasma assisted chemical vapor deposition process for multi-component oxide La 0.8 Sr 0.2 MnO 3 thin film

Wang, H.B.; Meng, Guangyao; Peng, Dingkun

doi:10.1016/s0040-6090(00)00781-1

Cited by 19 publications

(16 citation statements)

References 20 publications

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“…Chemical methods include sol-gel techniques, 10 metallo-organic decomposition (MOD), 11 and chemical vapor deposition (CVD). 12 Temperatures used in the application of chemical processes are usually lower (400-800 • C) than the ones used in physical methods. Another advantage is that large surface area films can be produced without the need for extra high vacuum environment.…”

Section: Introductionmentioning

confidence: 99%

Influence of molar ratio of citric acid to metal ions on preparation of La0.67Sr0.33MnO3 materials via polymerizable complex process

Yang

Chang

Huang

2005

Journal of the European Ceramic Society

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Section: Introductionmentioning

confidence: 99%

Influence of molar ratio of citric acid to metal ions on preparation of La0.67Sr0.33MnO3 materials via polymerizable complex process

Yang

Chang

Huang

2005

Journal of the European Ceramic Society

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“…In order to obtain thin films from nitrates, extra energy must be introduced to allow diffusion [17]. In this process, glycine is introduced with two purposes.…”

Section: Plasma-aacvdmentioning

confidence: 99%

Novel CVD Techniques for Micro‐ and IT‐SOFC Fabrication

Meng¹,

Song

Xia

et al. 2004

Fuel Cells

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At present, there are intensive research efforts towards intermediate temperature solid oxide fuel cells (IT‐SOFCs) with a thin film electrolyte and electrode. In view of the nature of molecular level reaction and the great potential of CVD processes for IT‐SOFCs and even Micro‐SOFC fabrication, various novel CVD techniques have been developed to prepare multi‐component oxide films and multi‐layers related to the SOFC. In this paper, novel CVD techniques are described and reviewed for possible applications in thin film electrolytes and electrodes for SOFCs, mainly based on the research activities of the author's laboratory. The techniques include metal‐organic CVD (MOCVD) with metal β‐diketonate chelates as precursors, single mixed source MOCVD, and aerosol assisted CVD (AACVD). AACVD can be operated with spray AAMOCVD, plasma‐AACVD, or oxy‐acetylene combustion AACVD. The results show their possible application in the fabrication of electrolyte and electrode thin films for SOFCs.

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“…Manganese oxides type perovskite are of scientific interest due to their potential applications in fuel cells and information storage, and to their diverse advantages, such as miniaturization, long life, and low costs [1][2][3][4][5][6][7]. La 0.7 Sr 0.3 MnO 3 (LSMO) is a compound that, given its characteristics, is a good candidate to be used in field magnetic sensors, non-volatile memories, oxygen sensors, and catalysts in the oxidation of light hydrocarbons [7].…”

Section: Introductionmentioning

confidence: 99%

Spin Coating technique for obtaining nanometric thin films in the system La0.7Sr0.3MnO3

Mera-Córdoba

Córdoba-Barahona

2017

Rev. Fac. Ing.

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Manganite in the La 0.7 Sr 0.3 MnO 3 system is of great interest due to its potential application in fuel cells, information storage, magnetic field sensors, non-volatile memories, oxygen sensors, and catalysts in the oxidation of light hydrocarbons. Given the scientific relevance of this material, this study describes the procedure to synthesize and characterize thin films of La 0.7 Sr 0.3 MnO 3 . Manganites were synthesized by means of the Pechini method, and deposited on strontium titanate substrates using spin-coating. Both the crystallinity of the films and their phases were studied with X-ray diffraction (XRD), finding that the films are polycrystalline and have a simple cubic structure with a lattice constant a=3.8653 ± 0.066 Ǻ. Scanning electron microscopy (SEM) showed a uniform surface with good morphological features, and the spectrum resulted from the Energy Dispersive X-Ray Spectroscopy (EDS) analysis over the same film was consistent with the molar ratio of the perovskite. Samples of 2, 4, and 6 layers were synthesized, obtaining thicknesses of 75.10 ± 0.01, 75.02 ± 0.01 and 74.07 ± 0.08 nm per monolayer. The results indicate that this method is useful to synthesize films of high crystalline quality and nanometric size.Keywords: manganite; Perovskite; thin films . ResumenLas manganitas en el sistema La 0,7 Sr 0,3 MnO 3 son de gran interés por su potencial aplicación en celdas de combustibles, almacenamiento de información, sensores de campo magnético, memorias no volátiles, sensores de oxígeno y catalizadores en la oxidación de hidrocarburos ligeros; dada la importancia científica que tiene este material, este trabajo presenta el procedimiento de síntesis y caracterización de películas delgadas de La 0,7 Sr 0,3 MnO 3 . Las manganitas se sintetizaron por el método de Pechini y fueron depositadas por Spin Coating en forma de películas delgadas en sustratos de titanato de estroncio. La cristalinidad de las películas y las fases presentes se estudiaron por difracción de rayos-X (DRX), encontrándose que las películas son de naturaleza policristalina y presentan * M. Sc. Institución Universitaria CESMAG (Pasto-Nariño, Colombia). gamera@iucesmag.edu.co. ** Universidad de Nariño (Pasto-Nariño, Colombia). *** M. Sc. Universidad de Nariño (Pasto-Nariño, Colombia). carcob@udenar.edu.co. Fecha de recepción: 7 de junio de 2016 Fecha de aprobación: 20 de noviembre de 2016Jenny Alejandra Mera-Córdoba -María Angélica Mera-Córdoba -Carlos Arturo Córdoba-Barahona Spin Coating technique for obtaining nanometric thin films in the system La0.7Sr0.3MnO3 estructura cúbica simple con contante de red a=3.8653 ± 0,066 Ǻ. La microscopía electrónica de barrido (SEM) muestra una superficie uniforme con buenas características morfológicas, y el espectro EDS medido sobre la misma película mostró consistencia con la relación molar de la perovskita. Se sintetizaron muestras de 2, 4 y 6 capas, obteniendo espesores de 75,10 ± 0,01, 75,02 ± 0,01 y 74,07 ± 0,08 nm por monocapa. Los resultados indican que con este método es posi...

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Aerosol and plasma assisted chemical vapor deposition process for multi-component oxide La 0.8 Sr 0.2 MnO 3 thin film

Cited by 19 publications

References 20 publications

Influence of molar ratio of citric acid to metal ions on preparation of La0.67Sr0.33MnO3 materials via polymerizable complex process

Influence of molar ratio of citric acid to metal ions on preparation of La0.67Sr0.33MnO3 materials via polymerizable complex process

Novel CVD Techniques for Micro‐ and IT‐SOFC Fabrication

Spin Coating technique for obtaining nanometric thin films in the system La0.7Sr0.3MnO3

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