“…AD can accommodate a broad spectrum of substrate materials, including metals [7,8], glass [9], ceramics [10], silicon [11], or even polymers [12]. Successful deposition has been shown for non-oxide materials (TiN [13], AlN [14,15], MgB 2 [16], MoSi/SiC [17]) as well as oxide materials (TiO 2 [18,19], ZrO 2 [20], Y 2 O 3 [21], Pb(Zr,Ti)O 3 [22], SrTi 1Àx Fe x O 3 [10], BFT [23], Bi 4 V 2 O 11Àd ) [24]), and compound materials (Al 2 O 3 /PTFE [25], ZnS/diamond [26], Bi 2 O 3 /TiO 2 [27], Bi 2 O 3 /V 2 O 5 [27]). Because of its wide applicability due to outstanding properties like high chemical inertness, wear resistance, and electrical resistivity, Al 2 O 3 has been one of the most investigated ceramics [28][29][30][31][32], but still its behavior during AD is not well understood.…”