Aerosol jet printed PZT actuated MEMS resonating cantilever scanner

Li, Mingyao; Peng, Kuan-Cheng; Hsu, Y. Y.; Chen, Peng-Jyun; Tsui, Chileung; Wu, Wen-Jong; Wang, Wei‐Chih

doi:10.1117/12.2545564

Cited by 1 publication

(1 citation statement)

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“…Piezoelectric actuators strike a balance between compact design and low power/ low voltage actuation, while offering the advantage of high dielectric strength [41][42][43][44][45][46][47][48][49][50][51][52] . However, piezoelectric actuator fabrication can be complicated, typically relying on techniques such as sol-gel, chemical vapor deposition, granule spray in vacuum, aerosol deposition or sputtering [53][54][55][56][57][58][59][60][61][62][63][64][65][66] . Additionally, current piezoelectric actuators are typically limited to small displacements in the range of 10 pm to 100 μm.…”

Section: Introductionmentioning

confidence: 99%

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Wang,

Li,

Peng

et al. 2024

Microsyst Nanoeng

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This study introduces a novel image capture and lighting techniques using a cutting-edge hybrid MEMS scanner system designed for compact microscopic imaging. The scanner comprises a tapered optical fiber waveguide and innovative aerosol-jet printed PZT (lead zirconate titanate) bimorph push-pull actuators on a stainless-steel substrate, effectively addressing issues that are commonly associated with PZT on silicon substrates such as fracture and layer separation. By leveraging nonlinear vibration, the scanner achieves a spiral scan pattern from a single signal input, in addition to the expected two-dimensional scanning and target illumination from two phase-shifted inputs. This capability is further enhanced by a novel process to taper the optical fiber, which reduces illumination scattering and tunes the fiber to the resonant frequencies of the scanner. The precisely tapered tip enables large fields of view while maintaining independent 2-axis scanning through one-degree-of-freedom actuation. Experimental validation showcases the successful generation of a spiral scan pattern with a 60 μm diameter scan area and a 10 Hz frame rate, effectively reconstructing scanned images of 5 μm lines, cross patterns (15 μm in length with a 5 μm gap), and structures of a Psychodidae wing.

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