AFM investigation of tribological properties of nano-patterned silicon surface

Marchetto, Diego; Rota, Alberto; Calabri, L.; Gazzadi, Gian Carlo; Menozzi, Claudia; Valeri, Sergio

doi:10.1016/j.wear.2007.12.010

Cited by 89 publications

(79 citation statements)

References 21 publications

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“…Weakening the commensurability constraint between lubricant and confining walls, we have proved that our conclusions about nanopatterning effectiveness hold true also in the presence of disordered substrates. Preliminary numerical simulations seem to show that even the presence of swelling at the substrate patterned area ͑typical of FIB nanofabrication 5,6 ͒ does not affect much the qualitative picture.…”

Section: Discussionmentioning

confidence: 96%

“…Besides, another important function of the surface dimples is to act as reservoir for lubricants capable of feeding the lubricating fluid directly between the two contacting surfaces. 3,4 Advanced experimental techniques, such as for example focused ion-beam ͑FIB͒ milling 5,6 or electron-beam lithography ͑EBL͒, 7 allow us nowadays to build and control surface structures and morphology with high spatial resolution down to the nanometer scale. This observation raises an interesting question in the context of nanolubrication and friction.…”

Section: Introductionmentioning

confidence: 99%

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Lubricated friction on nanopatterned surfaces via molecular dynamics simulations

et al. 2008

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Recent studies have proved the usefulness of macroscopic surface patterning for the improvement of tribological performances of sliding contacts. Here we investigate the effects of scaling down the texturing dimensions to the nanoscale. By means of classical molecular dynamics simulations, we show that the sliding frictional properties of a thin lubricant film are significantly affected by the presence of nanoscale superficial patterning of the moving confining walls, leading to a "mitigation" of the so-called stick-slip regime and to a consequent reduction of friction. We believe these findings to be relevant for nanotechnology applications.

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Section: Discussionmentioning

confidence: 96%

Section: Introductionmentioning

confidence: 99%

Lubricated friction on nanopatterned surfaces via molecular dynamics simulations

et al. 2008

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“…A silicon tip sliding on a silicon surface is a suitable model system for sliding behavior in M/NEMS [10,24]. In order to obtain the relations between surface textures and nanotribological properties, the pattern size, surface cross-section, and nanofriction behavior of the nanotexture-patterned silicon surfaces were characterized by AFM/FFM (CSPM5500 Electronics, Ben Yuan Nano-Instrument, China) using the contact mode.…”

Section: Nanofriction Behavior Measurementmentioning

confidence: 99%

Nanotribological properties of silicon surfaces nanopatterned by laser interference lithography

Yang

Zhao

et al. 2013

J Russ Laser Res

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The problems caused by the adhesive force and friction force become more critical when the size of M/NEMS devices shrinks to micro/nano-scale. The nanotexture-patterned surface is an effective approach to reduce friction force on micro/nano-scale. Laser interference lithography is an attractive method to fabricate micro/nanotextures, which is maskless and allows large area periodical structures to be patterned by a couple of seconds' exposure in a simple equipment system. We fabricate various nanogrooves with different pitch and space width on silicon wafers by laser interference lithography and chemical etching. We investigate the nanotribological properties of the patterned surfaces by AFM/FFM. We show that friction on the nano/micro-scale is related to the coverage rate of the nanogrooves, which decreases with increase in the space width and decrease in the pitch.

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“…Moreover, some diametrically opposite results regarding the effects of nanopatterns have been reported. Marchetto et al [17,18] observed Amontonian frictional behavior and unambiguous friction reduction for microscale-and nanoscale-grooved Si surfaces in contact with a flat square tip. Choi et al [19] investigated the friction behavior of highly ordered nickel membranes containing nanopores.…”

Section: Introductionmentioning

confidence: 98%

Tuning the Friction of Silicon Surfaces Using Nanopatterns at the Nanoscale

Han

Sun

et al. 2017

Coatings

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Friction and wear become significant at small scale lengths, particularly in MEMS/NEMS. Nanopatterns are regarded as a potential approach to solve these problems. In this paper, we investigated the friction behavior of nanopatterned silicon surfaces with a periodical rectangular groove array in dry and wear-less single-asperity contact at the nanoscale using molecular dynamics simulations. The synchronous and periodic oscillations of the normal load and friction force with the sliding distance were determined at frequencies defined by the nanopattern period. The linear load dependence of the friction force is always observed for the nanopatterned surface and is independent of the nanopattern geometry. We show that the linear friction law is a formal Amontons' friction law, while the significant linear dependence of the friction force-versus-real contact area and real contact area-versus-normal load captures the general features of the nanoscale friction for the nanopatterned surface. Interestingly, the nanopattern increases the friction force at the nanoscale, and the desired friction reduction is also observed. The enlargement and reduction of the friction critically depended on the nanopattern period rather than the area ratio. Our simulation results reveal that the nanopattern can modulate the friction behavior at the nanoscale from the friction signal to the friction law and to the value of the friction force. Thus, elaborate nanopatterning is an effective strategy for tuning the friction behavior at the nanoscale.

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AFM investigation of tribological properties of nano-patterned silicon surface

Cited by 89 publications

References 21 publications

Lubricated friction on nanopatterned surfaces via molecular dynamics simulations

Lubricated friction on nanopatterned surfaces via molecular dynamics simulations

Nanotribological properties of silicon surfaces nanopatterned by laser interference lithography

Tuning the Friction of Silicon Surfaces Using Nanopatterns at the Nanoscale

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