AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

Abstract

Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other applications. Atomic force microscopy (AFM) has been shown to be an instrument capable of investigating the nanomechanical behavior of many surfaces, including thin films. The measurements of tribo-mechanical behavior for MEMS materials are essential when it comes to designing and evaluating MEMS devices. A great deal of research has been conducted to evaluate the efficiency and reliability of different measurements methods for mechanical properties of MEMS material; nevertheless, the technologies regarding manufacturing and testing MEMS materials are not fully developed. The objectivesof this study are to focus on the review of the mechanical and tribological advantages of thin film and to highlight the experimental results of some thin films to obtain quantitative analyses, the elastic/plastic response and the nanotribological behavior. The slight fluctuation of the results for common thin-film materials is most likely due to the lack of international standardization for MEMS materials and for the methods used to measure their properties.

Overcoming Challenges and Limitations Regarding the Atomic Force Microscopy Imaging and Mechanical Characterization of Nanofibers

“…, for H > r tip (5) For example, if r tip = H, Equation ( 5) results in w exp − w = 2r tip as expected. The diagram of 1 2 w exp − w with respect to the fibril's height is also presented for the case of r tip = 8 nm and the cone's half angle ϕ = 20…”

“…Atomic force microscopy (AFM) is a high-resolution imaging technique in nanotechnology and materials science, enabling visualization and manipulation of atomic and molecular surfaces [1][2][3][4]. Operating as a type of scanning probe microscopy, AFM provides intricate data on surface topography [5], roughness [6], and mechanical properties [7,8]. AFM utilizes a small, sharp probe attached to the end of a cantilever to scan samples, interacting through forces such as van der Waals, electrostatics, and chemical bonds [9].…”

Beyond biology: alternative uses of cantilever-based technologies

“…Moreover, to perform conventional experiments, large samples are required, which implies loss of homogeneity and, hence, entails low reproducibility and reliability. The evaluation of the mechanical properties of macroscopic thin film specimens has been usually carried out through internal stress measurements by wafer buckling, 91 while other useful techniques, such as nanoindentation 92 or nanotribology, 93,94 yield information on hardness, adhesion or wear resistance. For extremely thin films, only nanomechanical characterization via cantilever-based technologies offers new possibilities regarding film characterization at the nanoscale.…”

Advances in Structural and Morphological Characterization of Thin Magnetic Films: A Review

“…These deflections correspond to tip-sample interaction forces that allow for the generation of topological images of the sample surface. AFM is ideally suited for characterizing thin films and buried interfaces as it can probe nanoscale morphology, surface roughness, friction, magnetism, electrical properties, and more [157][158][159][160]. Operating modes such as contact, tapping, and non-contact AFM allow for the optimized imaging of delicate samples.…”