2021
DOI: 10.1016/j.tsf.2021.138962
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Ageing mediated silicon suboxide interlayer growth in porous silicon: p-Si heterostructured metal-semiconductor-metal device for enhanced UV-visible photodetection

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Cited by 4 publications
(3 citation statements)
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“…The surface morphological features of the unannealed and annealed PS-ML: p + -Si samples are analysed with the help of field emission scanning electron microscope (FESEM) images and energy dispersive X-ray (EDX) measurements. The authors in their earlier work on PS: p-Si structure [49,50] reports that ageing and annealing treatment (𝑇 > 200 π‘œ 𝐢) have minimal effect on the overall thickness of the 𝑃𝑆 layer, though possess change on its surface oxygen contamination. In this article only the cross-sectional view FESEM micrograph of the unannealed PS-ML: p + -Si sample is presented, which are displayed in Fig 1 (a).…”
Section: 1morphological and Uv-vis Reflectance Analysismentioning
confidence: 99%
“…The surface morphological features of the unannealed and annealed PS-ML: p + -Si samples are analysed with the help of field emission scanning electron microscope (FESEM) images and energy dispersive X-ray (EDX) measurements. The authors in their earlier work on PS: p-Si structure [49,50] reports that ageing and annealing treatment (𝑇 > 200 π‘œ 𝐢) have minimal effect on the overall thickness of the 𝑃𝑆 layer, though possess change on its surface oxygen contamination. In this article only the cross-sectional view FESEM micrograph of the unannealed PS-ML: p + -Si sample is presented, which are displayed in Fig 1 (a).…”
Section: 1morphological and Uv-vis Reflectance Analysismentioning
confidence: 99%
“…The cleaning process involves using a diamond knife to cut the wafers into small pieces and then using the RCA clean process to remove any organic contaminants on the surface [1]. This is followed by using the piranha process, which involves using a mixture of H2SO4 and H2O2 to remove the native oxide layer and deposit a layer of SiO2 film on the wafer [2]. Finally, the wafers are dipped into BHF solution to remove the SiO2 layer.…”
Section: Fabricationmentioning
confidence: 99%
“…In addition, the optical method can also be used to detect the concentration of the air pollutants in the atmosphere. By using the optical methods, we can deploy a remote sensing system in the atmosphere [2][3]. The system can detect the amount of air pollutants in the atmosphere.…”
Section: Introductionmentioning
confidence: 99%