Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime

Massimino, Gianluca; Lazarova, Borka; Quaglia, Fabio; Corigliano, Alberto

doi:10.1080/19475411.2020.1834003

Cited by 9 publications

(4 citation statements)

References 15 publications

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“…The various materials are subjected to pre-stresses that vary in magnitude and sign. Even though the net residual stress can be either tensile or compressive, it is better to have tensile state stress as PMUTs with high net compressive stress can have reliability problems related to buckling and a sudden drop in resonance frequency [40], [42]. At the PZT layer, an electromechanically coupled problem is solved using a linear constitutive model of the piezoelectric material represented in a stress-charge form.…”

Section: A Single Pmut Analysismentioning

confidence: 99%

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

Abdalla,

Massimino,

D’Argenzio

et al. 2023

IEEE Sensors J.

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This study provides a comprehensive characterization of a 4 × 4 PMUT array suited for in-air applications. Crosstalk can be viewed as a lack of isolation among the transducers, with possible reasons including the electrical, acoustic, and structural coupling among the transducers. This study focuses on acoustic coupling as the primary cause of crosstalk, since the influence of electrical and structural coupling on crosstalk is shown to be negligible by comparing experimental tests and numerical analysis conducted in vacuum and in air. It is expected that acoustic coupling among diaphragms occurs due to air-connected cavities. Consequently, several scenarios are investigated in which the cavities are either partially or completely acoustically disconnected. The computed response spectra of the PMUTs demonstrate that the presence of secondary peaks, which indicated the presence of crosstalk, is diminished when the PMUTs are decoupled partially or completely as compared to an open cavity. The conducted acoustic tests also demonstrated that crosstalk impacts the intensity and directivity of the acoustic wave produced by the array.

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Section: A Single Pmut Analysismentioning

confidence: 99%

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

Abdalla,

Massimino,

D’Argenzio

et al. 2023

IEEE Sensors J.

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“…PMUTs are Micro-Electro-Mechanical Systems (MEMS)-based piezoelectric ultrasonic transducers generating ultrasonic waves that can propagate in air [ 15 , 16 , 17 , 18 , 19 , 20 ], liquid [ 21 , 22 , 23 ], or solid media [ 24 ]. Piezoelectric materials are used in a wide range of smart micro-systems [ 25 , 26 ].…”

Section: Introductionmentioning

confidence: 99%

“…Piezoelectric materials are used in a wide range of smart micro-systems [ 25 , 26 ]. Unlike bulky piezoelectric transducers, which utilize body modes, PMUTs generate waves through the bending motion of a thin piezoelectric active layer such as PZT [ 19 , 27 , 28 , 29 ]. The resonant frequency of the PMUT can be controlled by properly tailoring the in-plane dimension of the flexural membrane and the thicknesses of the constituent layers.…”

Section: Introductionmentioning

confidence: 99%

PMUTs Arrays for Structural Health Monitoring of Bolted-Joints

et al. 2023

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Micro-electro-mechanical systems (MEMS) have enabled new techniques for the miniaturization of sensors suitable for Structural Health Monitoring (SHM) applications. In this study, MEMS-based sensors, specifically Piezoelectric Micromachined Ultrasonic Transducers (PMUT), are used to evaluate and monitor the pre-tensioning of a bolted joint structural system. For bolted joints to function properly, it is essential to maintain a suitable level of pre-tensioning. In this work, an array of PMUTs attached to the head and to the end of a bolt, serve as transmitter and receiver, respectively, in a pitch-catch Ultrasonic Testing (UT) scenario. The primary objective is to detect the Change in Time of Flight (CTOF) of the acoustic wave generated by the PMUT array and propagating along the bolt’s axis between a non-loaded bolt and a bolt in service. To model the pre-tensioning of bolted joints and the transmission of the acoustic wave to and from a group of PMUTs through the bolt, a set of numerical models is created. The CTOF is found to be linearly related to the amount of pre-tensioning. The numerical model is validated through comparisons with the results of a preliminary experimental campaign.

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“…The multi-layered system is suspended on a cavity that provides enough space for the flexural movements of the plates. The active layer in the multi-layered system is typically a thin layer of a piezoelectric film made of lead zirconate titanate (PZT) deposited by sol-gel technique in hat configuration on a structural plate made of silicon [2,3]. The generation of the ultrasonic waves comes from the "inverse effect" of the piezoelectric material, causing a displacement in the membranes by applying an AC voltage signal between the electrodes.…”

Section: Introductionmentioning

confidence: 99%

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients

et al. 2022

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This paper presents a numerical reduced-order modeling (ROM) approach for complex multi-layered arrays of piezoelectric micromachined ultrasonic transducers (PMUTs). The numerical modeling technique adopted to generate an array of PMUTs consisting of a considerable number of transducers allows for a large reduction in computational cost without reducing accuracy. The modeling idea is based on coupling shell elements applied to the PMUT structural layers with 3D-solid elements applied to the piezoelectric layer. A set of eigenfrequency and frequency domain analyses are presented considering a single ROM of a PMUT performing in different ambients and the performing central frequencies are obtained for every considered scenario. A unique arrangement of 228 PMUTs is presented and tested for its ability to transmit and receive acoustic waves. The operating frequency band of the array and the level of interference and cross-talk among different PMUTs in the near field are estimated. Finally, the results from a preliminary experimental test performed to analyze the acoustic abilities of an 8 × 8 array of PMUTs are presented. A corresponding numerical model is created and the obtained results matched the experimental data, leading to a validation of the modeling technique proposed in this work.

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Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime

Cited by 9 publications

References 15 publications

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

An Experimental and Numerical Study of Crosstalk Effects in PMUT Arrays

PMUTs Arrays for Structural Health Monitoring of Bolted-Joints

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients

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