Aktive Thermosonde zur Messung des Energieeinstromes

Wiese, Ruben; Kersten, Holger; Wiese, Georg; Häckel, Marko

doi:10.1002/vipr.201100461

Cited by 8 publications

(4 citation statements)

References 9 publications

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“…Smaller changes in the energy influx are not measurable because of the stochastic fluctuations of the data. Figure 2 Temporal behaviour of temperature and heating power at the active probe during operation of an ion beam source [15,16].…”

Section: Resultsmentioning

confidence: 99%

Energy influx measurements with an active thermal probe in plasma-technological processes

Wiese¹,

Kersten²,

Wiese

et al. 2015

EPJ Tech Instrum

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Many plasma-technological applications are based on plasma wall interaction, which can be characterised by calorimetric probes to measure the energy influx from the plasma to the substrate surface. Passive probes are based on the principle of recording the temperature course during heating and cooling of the probe for calculating the energy influx. The disadvantages of these probes are that the energy influx has to be interrupted by switching off the energy source or by using suitable apertures and by the necessity of knowing the exact heat capacity of the probe. A continuously operating active probe is, therefore, developed which does not need to be calibrated and which compensates the environmental effects as well as the heat conduction by the probe holder. By means of controlled electrical heating the probe is set to a given working temperature and then the energy supply supporting the fixed operating temperature is measured. The energy influx by the plasma is compensated by decreasing the heating power and is directly displayed in J/cm 2 s. Some practical measurements are presented. Even, if the probe is designed as double probe the directionality of the energy influx can be determined.

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Section: Resultsmentioning

confidence: 99%

Energy influx measurements with an active thermal probe in plasma-technological processes

Wiese¹,

Kersten²,

Wiese

et al. 2015

EPJ Tech Instrum

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“…In contrast to the other probes, the ATP measures both the contribution of charged and neutral particles. A much more detailed description of the working principle of the active thermal probe can be found in [17][18][19].…”

Section: Active Thermal Probementioning

confidence: 99%

An advanced electric propulsion diagnostic (AEPD) platform for in-situ characterization of electric propulsion thrusters and ion beam sources

et al. 2016

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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“…An active calorimetric probe [16,68] was developed to overcome the drawback of calibration procedures and to monitor the energy flux continuously. The working principle is as follows:…”

Section: Active Calorimetric Probementioning

confidence: 99%

Calorimetric Probes for Energy Flux Measurements in Process Plasmas

2014

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This chapter gives an overview of the method of calorimetric probes which are used for characterizing the interaction between low-temperature plasmas and substrates in materials processing. Although the focus is on low-temperature nonequilibrium plasmas most of the concepts can also be transferred to thermal plasmas or are in fact adopted from fusion research. An introductory section showing the importance and complexity of plasma wall interactions is followed by a section providing an overview and comparison of various probe concepts, which have been developed in the last decades. Special focus is on the type of probes which are similar to the probes used by J.A. Thornton (In fact, Thornton was not the first, to use this type of probe. From his work from 1978 [1], one can follow the citations back to the work of Jackson in 1969, who used equation (6.7) for the determination of the power dissipated by a copper block located at substrate position in a sputtering discharge [2]) who was one of the pioneers connecting plasma characteristics with resulting surface properties. Thereafter, a short section gives a basic overview of the different contributions to the total energy influx and which are of importance for the plasma wall interaction. The last section shows different examples of applications of calorimetric probes. It demonstrates the applicability and flexibility of these types of probes for characterization of different low-temperature plasmas. The examples

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Aktive Thermosonde zur Messung des Energieeinstromes

Cited by 8 publications

References 9 publications

Energy influx measurements with an active thermal probe in plasma-technological processes

Energy influx measurements with an active thermal probe in plasma-technological processes

An advanced electric propulsion diagnostic (AEPD) platform for in-situ characterization of electric propulsion thrusters and ion beam sources

Calorimetric Probes for Energy Flux Measurements in Process Plasmas

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