2015
DOI: 10.11591/ijece.v5i4.pp849-858
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Al Microheater and Ni Temperature Sensor Set based-on Photolithography with Closed-Loop Control

Abstract: This article proposes the development of a new low-cost microheater and temperature sensor set. It was developed based on Micro-Electro-Mechanical Systems (MEMS) which based on photolithography technique and lift-off technique. Thin film of aluminum was utilized as microheater and encompassed nickel temperature sensor inside in order to decrease response time of the desired temperature. To control the various temperatures correctly, closed-loop feedback control based on PI-controller was adapted into control c… Show more

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Cited by 6 publications
(5 citation statements)
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“…However, this material cannot always be used effectively due to the high cost of the material [35] and the poor adhesion to the glass substrate. For this reason, a layer of chromium or titanium is additionally deposited before the platinum is deposited to increase its adhesion to the substrate [36][37][38].…”
Section: Microheater Technologymentioning
confidence: 99%
“…However, this material cannot always be used effectively due to the high cost of the material [35] and the poor adhesion to the glass substrate. For this reason, a layer of chromium or titanium is additionally deposited before the platinum is deposited to increase its adhesion to the substrate [36][37][38].…”
Section: Microheater Technologymentioning
confidence: 99%
“…P0 port input command byte EEROM programming; when the verifier is connected to the resistance, the output command byte. P0 port driver 8 input channel LSTTL load current is absorbed in [11]. P1.0-p1.7: P1 is an 18 Bit quasi bidirectional I / O port.…”
Section: Pin Functionmentioning
confidence: 99%
“…The temperature sensor is one of the important carriers of the temperature measurement and control system. It transmits the collected temperature data information to the circuit and directly converts it into electrical signal [10][11][12]. But because the initial signal is relatively small, so you need the influence of the amplification processing of the primary voltage amplification circuit.…”
Section: Introductionmentioning
confidence: 99%
“…Environmental monitoring and air quality detection systems have been subject of extensive studies in the literature ( [14,15,16]). Mehta et al [17], for example, developed a cloud based air quality detection system that analyzes data for providing atmospheric quality measurements to the user in real time.…”
Section: Related Workmentioning
confidence: 99%