Al/Ti-film-resistor based thermal heater with Zig-Zag configuration for MEMS application

Abstract

In this paper, we proposed a micro-heater based on Al/Ti-film resistors for MEMS application. The film heater, designed with unique Zig-Zag configuration, has a high heating efficiency as generated Joule heat could be confined in Zig-Zag area. Consequently, much higher maximum temperature could be achieved under the lower applied voltage, compared with conventional strategy. Based on MEMS technique, thin film based micro-heater was fabricated, and experimental characterization was carried out in room temperature. Since the micro-heaters are all in the form of thin film-resistors, the structure design is simple and fabrication process compatibility is good, which is particularly suitable in the fields of MEMS integration and actuation application.