The molecular layer deposition (MLD) method can be used
to deposit
hybrid organic–inorganic films with precisely defined composition,
flexible properties, and conformality on different substrates. In
this study, hafnium-based organic–inorganic hybrid polymer
films were studied as potential coatings for silicon nanoparticles
(SiNPs) used in composite lithium-ion battery (LIB) anodes, an application
which requires the film to be both flexible and stable under electrochemical
conditions. Hf-hybrid films were successfully deposited by MLD using
sequential exposure of the homoleptic tetrakis(dimethylamido) hafnium
complex and ethanolamine as the reactants. The self-limiting surface
reactions lead to a constant growth per cycle (GPC) of ∼2.0
Å/cycle at 120 °C. Temperature-dependent growth was observed,
with the GPC decreasing from ∼2.5 to ∼1.1 Å/per
cycle as the temperature was increased from 65 to 145 °C. Scanning
transmission electron microscopy and electron energy loss spectroscopy
mapping confirm that a thin, dense, and conformal Hf-based MLD layer
is deposited on the SiNPs. The presence of expected C–N, C–O,
and −CH2 moieties in the MLD films was confirmed
by Fourier transform infrared spectroscopy. Hafnium nitride and hafnium
oxide bonds within the hybrid thin films were identified by X-ray
photoelectron spectroscopy. Characterization results indicated that
the deposited hafnium-based organic–inorganic hybrid films
contain both metal oxynitride bonds and organic bonds, including C–C,
C–O, and C–N. This Hf-based MLD thin film was tested
on LIB SiNP composite anodes as an artificial solid–electrolyte
interphase, with results showing that the capacity retention increased
by
about 35% after 110 cycles in a LIB application.