ALD/MLD coating of patterned vertically aligned carbon nanotube micropillars with Fe-NH<sub>2</sub>TP hybrids

Silva, R. M.; Rocha, João; Silva, Rui

doi:10.1039/d3nr01610b

Cited by 2 publications

(3 citation statements)

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“…A more appealing method would be to grow the thin films directly on a substrate from gaseous precursors using the ALD/MLD technique. 42,60 The ALD/MLD process for the Fe-BDC thin films is schematically illustrated in Figure 2. Since the process does not involve any solvents and all the gas-phase byproducts (such as HCl) are removed from the reaction chamber during the purging steps, chemical compositions/bonding schemes and crystal structures different from the widely studied solutionsynthesized iron-terephthalates can be anticipated.…”

Section: Introductionmentioning

confidence: 99%

“…). − Moreover, the excellent adsorption and desorption capabilities of Fe-BDC MOFs, induced by the specific ordered and porous structures, are attractive for, e.g., drug delivery, gas separation, and lithium-ion battery solutions. − In practice, many of the applications would require Fe-BDC thin films, which have so far been challenged only through solution-based thin-film fabrication techniques, ,,− incompatible with industry standards. A more appealing method would be to grow the thin films directly on a substrate from gaseous precursors using the ALD/MLD technique. , …”

Section: Introductionmentioning

confidence: 99%

“…A more appealing method would be to grow the thin films directly on a substrate from gaseous precursors using the ALD/MLD technique. 42 , 60 …”

Section: Introductionmentioning

confidence: 99%

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Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films

Jussila,

Philip,

Rubio-Giménez

et al. 2024

Chem. Mater.

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Advanced deposition routes are vital for the growth of functional metal−organic thin films. The gas-phase atomic/ molecular layer deposition (ALD/MLD) technique provides solvent-free and uniform nanoscale thin films with unprecedented thickness control and allows straightforward device integration. Most excitingly, the ALD/MLD technique can enable the in situ growth of novel crystalline metal−organic materials. An exquisite example is iron-terephthalate (Fe-BDC), which is one of the most appealing metal−organic framework (MOF) type materials and thus widely studied in bulk form owing to its attractive potential in photocatalysis, biomedicine, and beyond. Resolving the chemistry and structural features of new thin film materials requires an extended selection of characterization and modeling techniques.Here we demonstrate how the unique features of the ALD/MLD grown in situ crystalline Fe-BDC thin films, different from the bulk Fe-BDC MOFs, can be resolved through techniques such as synchrotron grazing-incidence X-ray diffraction (GIXRD), Mossbauer spectroscopy, and resonant inelastic X-ray scattering (RIXS) and crystal structure predictions. The investigations of the Fe-BDC thin films, containing both trivalent and divalent iron, converge toward a novel crystalline Fe(III)-BDC monoclinic phase with space group C2/c and an amorphous Fe(II)-BDC phase. Finally, we demonstrate the excellent thermal stability of our Fe-BDC thin films.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films

Jussila,

Philip,

Rubio-Giménez

et al. 2024

Chem. Mater.

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Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements

Ghazy,

Zanders,

Devi

et al. 2024

Adv Materials Inter

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High‐quality rare earth element (R) based thin films are in demand for applications ranging from (opto)electronics and energy conversion/storage to medical diagnostics, imaging and security technologies. Atomic layer deposition (ALD) offers large‐area homogeneous and conformal ultrathin films and is uniquely suited to address the requirements set by the potential applications of R‐based thin films. The history starts from the 1990s, when the first electroluminescent R‐doped thin films were grown with ALD. The interest soon expanded to rare earth element oxide layers as high‐k gate dielectrics in semiconductor devices, and later to complex ternary and quaternary perovskite oxides with novel functional properties. The most recent advancements related to the combined atomic/molecular layer deposition (ALD/MLD) have rapidly expanded the family of R‐organic hybrid materials with intriguing luminescence and up‐conversion properties. This review provides up‐to‐date insights to the current state of ALD and ALD/MLD research of R‐based thin films and highlights their application potential.

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ALD/MLD coating of patterned vertically aligned carbon nanotube micropillars with Fe-NH₂TP hybrids

Abstract: The creation of nanoscale organic-inorganic hybrid coatings with uniform architecture and high surface area, while maintaining their structural and morphological integrity, remains a significant challenge in the field. In this...

Cited by 2 publications

References 31 publications

Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films

Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films

Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements

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ALD/MLD coating of patterned vertically aligned carbon nanotube micropillars with Fe-NH2TP hybrids

Abstract: The creation of nanoscale organic-inorganic hybrid coatings with uniform architecture and high surface area, while maintaining their structural and morphological integrity, remains a significant challenge in the field. In this...

Cited by 2 publications

References 31 publications

Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films

Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films

Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements

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ALD/MLD coating of patterned vertically aligned carbon nanotube micropillars with Fe-NH₂TP hybrids