“…Therefore, It is used in ultraviolet polarizer, optoelectronic displays, high temperature devices and short wavelength light source/detector applications [1,3,4]. AlN and Al-rich AlGaN alloy films find a crucial role in UV-LED (covering wavelengths from 210 to 375 nm), where the insulating properties can be used in the fabrication of GaN, GaAs and InP based electronic, radio-frequency UV sensor and optical devices [5,6]. Since they have high figure of merit for piezoelectric response, they are suitable for ultra-small mechanical pressures.…”