Aligned Carbon Nanotube Formation via Radio-Frequency Magnetron Plasma Chemical Vapor Deposition

HATAKEYAMA, Rikizo; Kato, Toshiaki

doi:10.1585/jspf.81.653

Cited by 4 publications

(3 citation statements)

References 32 publications

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“…The CNTs grown were characterized by field emission scanning electron microscopy (FE-SEM, Hitachi S4700), and high-resolution transmission electron microscopy (TEM, JEOL, JEM2000EX) and Raman spectroscopy (Jovin Yvon, LabRAM HR800) were carried out to determine the structure of the Pd-filled CNTs. in Figure 1(b) and those on Pd (40 nm)/Al (10 nm)/Si in Figure 1(c) are well aligned and homogeneously distributed by the plasma sheath effect in MPECVD [16]. The diameter of the tip of CNTs is approximately 100 nm, and Pdrelated materials are visible as bright contrast inside the CNTs as shown in Figure 1(d).…”

Section: Methodsmentioning

confidence: 72%

“…Prior to the CNTs growth, the substrate was exposed to hydrogen plasma for 3 minutes to clean the substrate as well as to activate the catalyst. Hydrogen plasma has a significant annealing effect on Pd particles and alters their morphology [16]. The CNTs grown were characterized by field emission scanning electron microscopy (FE-SEM, Hitachi S4700), and high-resolution transmission electron microscopy (TEM, JEOL, JEM2000EX) and Raman spectroscopy (Jovin Yvon, LabRAM HR800) were carried out to determine the structure of the Pd-filled CNTs.…”

Section: Methodsmentioning

confidence: 99%

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Growth of Pd‐Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy

Sakamoto

Chiu

Tanaka³

et al. 2009

Journal of Nanomaterials

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We have synthesized Pd-filled carbon nanotubes (CNTs) oriented perpendicular to Si substrates using a microwave plasma-enhanced chemical vapor deposition (MPECVD) for the application of scanning probe microscopy (SPM) tip. Prior to the CVD growth, Al thin film (10 nm) was coated on the substrate as a buffer layer followed by depositing a5∼40 nm-thick Pd film as a catalyst. The diameter and areal density of CNTs grown depend largely on the initial Pd thickness. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) images clearly show that Pd is successfully encapsulated into the CNTs, probably leading to higher conductivity. Using optimum growth conditions, Pd-filled CNTs are successfully grown on the apex of the conventional SPM cantilever.

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Section: Methodsmentioning

confidence: 72%

Section: Methodsmentioning

confidence: 99%

Growth of Pd‐Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy

Sakamoto

Chiu

Tanaka³

et al. 2009

Journal of Nanomaterials

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“…Plasma processes have already been implemented in semiconductor processing using weakly ionized plasma, and new plasma-based technologies such as plasma CVD for the aligned growth of nanotubes [1], and microplasma sputtering of thin films inside narrow tubes [2], have recently been introduced. The structure and characteristics of plasmas are being analyzed by both simulations and experiments.…”

Section: Introductionmentioning

confidence: 99%

Spline function expression by orthogonal polynomial weighted sampling for high‐speed electric field calculation

Miyazaki

Kitamori

2009

Electrical Engineering Japan

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SUMMARYIn the simulation of plasma processes, minimizing the error associated with the electric field calculation in the vicinity of the sheath is an important consideration. The sheath length scale compared to the plasma size, and the fact that the electric fields must be solved for self-consistency with equations describing the plasma chemistry, make the electric field solution particularly expensive. Because an internal electric field is calculated based on the density of charged particles, it is necessary to obtain the density of charged particles correctly but at minimum possible expense. We describe an electric field simulation with high speed and good accuracy made possible by the description of the charge density by spline functions. Previously, we have taken advantage of the orthogonality of the Legendre polynomial in our methodology described as LPWS (Legendre Polynomial Weighted Sampling). Sampling with other orthogonal functions is also possible and we have thus generalized our method. A generalization called Orthogonal Polynomial Weighted Sampling (OPWS), in which the coefficients of the B-spline function are obtained from the coefficients of the orthogonal expansion, has been developed and is described in this paper.

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Spline Function Expression by Orthogonal Polynomial Weighted Sampling for High-Speed Electric Field Calculation

Miyazaki

Kitamori

2007

IEEJ Trans. FM

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In the simulation of plasma processes, minimizing the error associated with the electric field calculation in the vicinity of the sheath is an important consideration. The sheath length scale compared to the plasma size, and the fact that the electric fields must be solved for self‐consistency with equations describing the plasma chemistry, make the electric field solution particularly expensive. Because an internal electric field is calculated based on the density of charged particles, it is necessary to obtain the density of charged particles correctly but at minimum possible expense. We describe an electric field simulation with high speed and good accuracy made possible by the description of the charge density by spline functions. Previously, we have taken advantage of the orthogonality of the Legendre polynomial in our methodology described as LPWS (Legendre Polynomial Weighted Sampling). Sampling with other orthogonal functions is also possible and we have thus generalized our method. A generalization called Orthogonal Polynomial Weighted Sampling (OPWS), in which the coefficients of the B‐spline function are obtained from the coefficients of the orthogonal expansion, has been developed and is described in this paper. © 2009 Wiley Periodicals, Inc. Electr Eng Jpn, 169(1): 1–8, 2009; Published online in Wiley InterScience (http://www.interscience.wiley.com). DOI 10.1002/eej.20769

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Aligned Carbon Nanotube Formation via Radio-Frequency Magnetron Plasma Chemical Vapor Deposition

Cited by 4 publications

References 32 publications

Growth of Pd‐Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy

Growth of Pd‐Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy

Spline function expression by orthogonal polynomial weighted sampling for high‐speed electric field calculation

Spline Function Expression by Orthogonal Polynomial Weighted Sampling for High-Speed Electric Field Calculation

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