Aligned multi-walled carbon nanotubes on different substrates by floating catalyst chemical vapor deposition: Critical effects of buffer layer

Líu, Hao; Zhang, Yong; Arato, David; Li, Ruying; Mérel, Philippe; Sun, Xueliang

doi:10.1016/j.surfcoat.2008.02.025

Cited by 70 publications

(42 citation statements)

References 43 publications

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“…In this study, the formation of vertically aligned MWCNTs was confirmed from TEM images given in Fig. This inter-planar spacing range was consistent with one measured by Liu et al while investigating the affect of ferrocene catalyst on the CNTs growth on a Si/SiO 2 /Al substrate [19]. These images with different magnifications indicate the bulk growth of the CNTs on the substrate surface.…”

Section: Resultssupporting

confidence: 89%

“…Some of the SEM images with different magnifications are given in Fig. In contrast, Liu et al [19] synthesized the CNTs will well defined boundaries. The carpet like areas of aligned and thick CNTs were noticed in these images at fixed temperature of 850 • C. Very few amorphous carbons were seen in the CNTs images for 0.15 g ferrocene which is an evidence of highly crystalline structures of grown CNTs.…”

Section: Resultsmentioning

confidence: 97%

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Effect of ferrocene concentration on the quality of multiwalled CNTs grown by floating catalytic chemical vapor deposition technique

Shukrullah

Mohamed

Shaharun

et al. 2014

Main Group Chemistry

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Controllable synthesis of quality carbon nanotubes is a precondition for their broad applications. The objective of the work was to study the effect of catalyst concentration on the quality, diameter, length, alignment and crystallinity of the grown multiwalled carbon nanotubes (MWCNTs). To meet the stated objective, MWCNTs were successfully synthesized by using floating catalytic chemical vapor deposition technique. The ferrocene concentration was varied from 0.1 to 0.2 g and MWCNTs were synthesized with ethylene as a carbon precursor at reaction temperature of 850 • C. The grown MWCNTs were characterized by using scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy. The obtained data revealed that an increase in concentration of the ferrocene significantly affects the diameter, crystallinity and growth of nanotubes, however, negligible effect on the CNTs forest length was noticed. The dense, uniform and meadow like patterns of grown CNTs were observed for 0.15 g ferrocene. The average diameter of the grown CNTs was ranged from 32-75 nm. Above 0.15 g ferrocene, some of the grown CNTs were found defective and few black spots were also appeared in TEM images.

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Section: Resultssupporting

confidence: 89%

Section: Resultsmentioning

confidence: 97%

Effect of ferrocene concentration on the quality of multiwalled CNTs grown by floating catalytic chemical vapor deposition technique

Shukrullah

Mohamed

Shaharun

et al. 2014

Main Group Chemistry

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“…As mentioned above, aluminum can be used as effective underlayer or substrate for catalyst deposition, probably due to its easy formation of a passivation oxide layer on the surface of Al (Liu, et al, 2008). In our study, Ni nanoparticles were homogeneously deposited on Al particle surface by a direct deposition-precipitation method.…”

Section: Aluminum Powdermentioning

confidence: 89%

Direct Growth of Carbon Nanotubes on Metal Supports by Chemical Vapor Deposition

Zhao¹,

Kang²

2011

Carbon Nanotubes - Synthesis, Characterization, Applications

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“…Recently, Al and Al 2 O 3 have been used as the intermediate buffer layer for the growth of VA-CNTs [9][10]. These buffer layers can help to prevent agglomeration of Fe catalyst, and to provide more active nucleation sites during the annealing step of the pyrolysis CVD process.…”

Section: Introductionmentioning

confidence: 99%

“…These buffer layers can help to prevent agglomeration of Fe catalyst, and to provide more active nucleation sites during the annealing step of the pyrolysis CVD process. Therefore, Fe nano-particles would be trapped on the Al or Al 2 O 3 interfaces [9][10].…”

Section: Introductionmentioning

confidence: 99%

The growth of 3D VA-CNTs stacks by predefining multilayered Al/Fe catalyst films for MEMS fabrication

Cheng

Fang

2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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This study presents a novel approach to fabricate highly-structured 3D vertically-aligned carbon nanotubes (VA-CNTs) architectures, and further integrates 3D VA-CNTs with MEMS surface micromachining to fabricate suspended 3D CNTs structures. The merits of presented approach are as follows: (1) highly-structured 3D VA-CNTs stacks can be achieved by predefining multilayered Al/Fe catalyst films; (2) only single run of the pyrolysis CVD process is required to grow multilayered 3D VA-CNTs stacks; (3) the design flexibility of the micro-structure in out-of-plane direction can be increased by the variation layers of CNTs stacks. Preliminary fabrication results implement various 3D VA-CNTs architectures. Furthermore, 3D CNTs stacks have been integrated with MEMS surface micromachining to demonstrate different thickness of 3D CNTs suspended cantilevers and probe. The out-of-plane resonant frequency has also been calibrated to characterize different stiffness of the 3D CNTs suspended devices.

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Aligned multi-walled carbon nanotubes on different substrates by floating catalyst chemical vapor deposition: Critical effects of buffer layer

Cited by 70 publications

References 43 publications

Effect of ferrocene concentration on the quality of multiwalled CNTs grown by floating catalytic chemical vapor deposition technique

Effect of ferrocene concentration on the quality of multiwalled CNTs grown by floating catalytic chemical vapor deposition technique

Direct Growth of Carbon Nanotubes on Metal Supports by Chemical Vapor Deposition

The growth of 3D VA-CNTs stacks by predefining multilayered Al/Fe catalyst films for MEMS fabrication

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