Alignment Algorithm for Nano-scale Three-dimensional Printing System

Jang, Ki-Hwan; Lee, Kang-In; Kim, Chung-Soo; Chu, Wujin; Ahn, Sung‐Hoon

doi:10.7736/kspe.2014.31.12.1101

Cited by 2 publications

(3 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For integration, reference marks were patterned using FIB milling, and were aligned using scanning ion microscopy (SIM) [35]. The alignment marks were patterned using FIB milling near to the fabrication field, and some marks were used to align the x-axis and rotational degree of freedom, whereas others were used to align the y-axis.…”

Section: Alignment Of Different Processesmentioning

confidence: 99%

“…A referencing technique to align the coordinate system of three different systems was investigated and implemented [41]. Since the AFN printing system had a width scale slightly larger than desired, the referencing system had to be designed such that it could be resolved after AFN printing, micro-machining, and FIB milling.…”

Section: Process Configuration Overviewmentioning

confidence: 99%

See 1 more Smart Citation

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

The aim of this work was to develop a novel hybrid manufacturing method for nanoscale three-dimensional (3D) printing with multi-material capabilities. 3D structuring methods at the micro/nanoscale are major goals of various engineering fields, and much work has been carried out to improve the minimum feature size, geometrical complexity, and material selection. With the aim of nanoscale multimaterial printing, a hybrid process was reported with an integrated nanoparticle deposition system (NPDS) and focused ion beam (FIB) system; however this process has limitations in terms of surface roughness and control over the layer thickness, as well as with the process scale, and furthermore, lack of sacrificial layers.In this dissertation, a novel hybrid process is described, which combines aerodynamically focused nanoparticle (AFN) printing, micro-machining and focused ion beam (FIB) milling. AFN printing is based on NPDS, and micromachining was used for local planarization. In addition to these processes, spincoating was used to fabricate sacrificial layers. By bridging these different II micro/nanoscale processes, the resulting hybrid process can address the limitations of the individual processes.To create the hybrid process, each process was investigated to enable compatibility. With the AFN printing system, the surface morphology of a detached substrate was observed, and the bonding mechanism between the substrate and nanoparticles was investigated. A novel printing strategy was identified to reduce the scale of the process. With the micro-machining system, different tool geometries were investigated. Complex geometries inspired by conventional-scale tools were implemented on the micro-scale, and their effects were investigated. With the FIB system, material re-deposition phenomena were investigated to reduce defects that occur during ion sputtering. A novel path-generation strategy was identified and investigated for different scanning paths.Process capability is discussed using fabrication examples and functional applications. The novel hybrid process represents a significant advance in the state of the art, and enables far improved process scales or dimensional degree of freedom, without losing the advantages of broad choice of materials.3D-pinted micro bi-material cantilevers were fabricated as a thermal actuator.The mechanical and thermal properties of the structure were investigated using an in-situ measurement system, and irregular thermal phenomena were analyzed. It is expected that these in-situ measurements of the 3D printed microstructure will contribute to materials research.Various 3D structures can be fabricated using the process described here from a range of metal/ceramic inorganic materials, including polymers. In particular, it is expected that the process will contribute to the area of customized nanoscale structuring, with potential applications in medical treatments. It is also expected that this work will contribute to further improvements in manufacturing technology by combining different m...

show abstract

Section: Alignment Of Different Processesmentioning

confidence: 99%

Section: Process Configuration Overviewmentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

Self Cite

View full text Add to dashboard Cite

show abstract

“…In addition, various materials can be utilized in the process [13,14] because of their flexibility of materials. However, alignment issues are arisen due to multiple set-up [15]. Those processes proceed in different locations; structures are delivered between processes, and rotational and translational errors are inevitable.…”

Section: Introductionmentioning

confidence: 99%

50 nm Scale Alignment Method for Hybrid Manufacturing Processes for Full 3D Structuring

Jang

Yoon

Lee

et al. 2020

Int. J. Precis. Eng. Manuf.

Self Cite

View full text Add to dashboard Cite

In micro-/nano-scale, multi-material three-dimensional (3D), structuring has been a major research area for making various applications. To overcome dimensional and material limitations, several hybrid processes have been proposed. The hybrid processes were performed in the same or different numerically controlled stages. If the stages differed, the substrate was moved and locked to the stage before fabrication. During the locking, alignment error occurred. This error became problematic because this significantly compromised the quality of final structures. Here, an alignment method for a hybrid process consisted of a focused ion beam milling, aerodynamically focused nanoparticle printing, and micro-machining was developed. Two sets of collinear marks were placed at the edges of the substrate. Rotational and translational errors were calculated and compensated using the marks. Processes having different scales were bridged through this alignment method. Various materials were utilized, and accuracy was less than 50 nm when the length of the substrate was less than 13 mm. The alignment method was employed to fabricate a V-shaped structure and step-shaped structure using polymer, ceramic, and metal.

show abstract

Alignment Algorithm for Nano-scale Three-dimensional Printing System

Cited by 2 publications

References 15 publications

Hybrid 3D printing by bridging micro/nano processes

Hybrid 3D printing by bridging micro/nano processes

50 nm Scale Alignment Method for Hybrid Manufacturing Processes for Full 3D Structuring

Contact Info

Product

Resources

About