All-dielectric broadband non-polarizing parallel plate beam splitter operating between 450-650nm

Wang, Wenliang; Xiong, Shenming; Zhang, Yundong

doi:10.1117/12.782995

3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technolo 2007

DOI: 10.1117/12.782995

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All-dielectric broadband non-polarizing parallel plate beam splitter operating between 450-650nm

Wenliang Wang

Shenming Xiong

Yundong Zhang

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2009

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Research on NC interpolation algorithm for rotary symmetric aspheric ultrasonic-magnetorheological compound finishing

Zhang

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Ultrasonic-magnetorheological compound finishing ͑UMC finishing͒ is a new technique for the ultraprecision machining of aspheric surfaces, especially for the ultraprecision machining of small-radiused concave surfaces and freeform surfaces. In this article, an UMC finishing equipment with five axes, four of which perform linkage movement, was developed. According to characteristic of UMC finishing, NC interpolation algorithm for rotary symmetric aspheric based on this equipment was researched. The derivation process and computer simulation result of the algorithm were also presented. The interpolation error of this algorithm was analyzed and the calculation formula was also proposed. According to the result of analysis, the precision of the interpolation algorithm is high and the algorithm is very useful. A great number of polishing experiments prove that high quality aspheric surface can be machined using this numerical interpolation algorithm. The profile accuracy of 58.32 nm and surface roughness Ra of 0.746 nm can be obtained stably.

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Research on NC interpolation algorithm for rotary symmetric aspheric ultrasonic-magnetorheological compound finishing

Zhang

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

View full text Add to dashboard Cite

show abstract

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All-dielectric broadband non-polarizing parallel plate beam splitter operating between 450-650nm

Cited by 1 publication

References 0 publications

Research on NC interpolation algorithm for rotary symmetric aspheric ultrasonic-magnetorheological compound finishing

Research on NC interpolation algorithm for rotary symmetric aspheric ultrasonic-magnetorheological compound finishing

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