All-Dielectric Color Filters Using SiGe-Based Mie Resonator Arrays

Wood, Thomas; Naffouti, Meher; Berthelot, Johann; David, Thomas; Claude, Jean-Benoît; Leo, Metayer
,; Delobbe, Anne; Favre, Luc; Ronda, A.; Berbézier, Isabelle; Bonod, Nicolas; Abbarchi, Marco

doi:10.1021/acsphotonics.6b00944

Cited by 89 publications

(84 citation statements)

References 57 publications

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“…) and e)) we highlight rather large geometrical aspect ratios η exceeding 0.7 45,61 of bare SiGe islands and progressive smoothing of the samples' roughness when increasing the thickness of the conformal layers (e.g. the root mean square, RMS goes from ∼58 nm for sample II up to ∼35 nm for sample II-C, …”

Section: B Experimentalmentioning

confidence: 79%

“…While η remains low in pure Si islands, it is higher in SiGe Si 45,61 . Here it is worth mentioning that the larger extinction coefficient of Ge with respect to Si at short wavelengths leads to enhanced losses (Supplementary Information SI Fig.SI.…”

Section: A Solid State Dewetting For Sige-based Mie Resonatorsmentioning

confidence: 92%

“…2). However, theoretical simulations 65,66 and practical implementations 45,67,68 have unambiguously demonstrated the relevance of Ge for dielectric Mie resonators, at least for wavelengths larger than ∼500 nm.…”

Section: A Solid State Dewetting For Sige-based Mie Resonatorsmentioning

confidence: 99%

“…All these properties can be modified by adding Ge before, during or after dewetting [42][43][44][45]60,61,63 potentially providing full control over their physical properties. However, in SiGe-based samples, Si-rich and Ge-rich particles are spatially separate, leading to large inhomogeneities of the morphological properties over micrometric distances 44,60,61 that make this method unsuitable for performing devices.…”

Section: A Solid State Dewetting For Sige-based Mie Resonatorsmentioning

confidence: 99%

“…One viable and promising route is solid-state dewetting of ultra-thin films of metals 18,[34][35][36][37][38][39][40][41] and semiconductors, [42][43][44][45][46] a natural phenomenon exploited for the self-assembly of high-quality photonic structures. The instability giving rise to the dewetting phenomenon in thin films is mediated by the surface diffusion of atoms and occurs upon annealing at high temperature (even well below the melting point of the material) [47][48][49][50][51][52][53][54][55][56][57][58] .…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Self-assembled antireflection coatings for light trapping based on SiGe random metasurfaces

Bouabdellaoui

Checcucci

Wood

et al. 2018

Phys. Rev. Materials

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We demonstrate a simple self-assembly method based on solid state dewetting of ultra-thin silicon films and germanium deposition for the fabrication of efficient anti reflection coatings on silicon for light trapping. Via solid state dewetting of ultra-thin silicon on insulator and epitaxial deposition of Ge we fabricate SiGe islands with a high surface density, randomly positioned and broadly varied in size. This allows to reduce the reflectance to low values in a broad spectral range (from 500 nm to 2500 nm) and a broad angle (up to 55 degrees) and to trap within the wafer a large portion of the impinging light (∼40%) also below the band-gap, where the Si substrate is non-absorbing. Theoretical simulations agree with the experimental results showing that the efficient light coupling into the substrate mediated by Mie resonances formed within the SiGe islands. This lithography-free method can be implemented on arbitrarily thick or thin SiO2 layers and its duration only depends on the sample thickness and on the annealing temperature.

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Section: B Experimentalmentioning

confidence: 79%

Section: A Solid State Dewetting For Sige-based Mie Resonatorsmentioning

confidence: 92%

Section: A Solid State Dewetting For Sige-based Mie Resonatorsmentioning

confidence: 99%

Section: A Solid State Dewetting For Sige-based Mie Resonatorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Self-assembled antireflection coatings for light trapping based on SiGe random metasurfaces

Bouabdellaoui

Checcucci

Wood

et al. 2018

Phys. Rev. Materials

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Titania‐Based Spherical Mie Resonators Elaborated by High‐Throughput Aerosol Spray: Single Object Investigation

Checcucci

Bottein

Claude

et al. 2018

Adv Funct Materials

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The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10. 1002/adfm.201801958. tives to replace complex and bulky optical elements. This unique ability is due to strong modifications of the local density of optical states occurring in sub-micrometric objects made of materials featuring high dielectric constant and sufficiently small absorption losses.Most studies over the last years have mainly addressed silicon- [4][5][6][7][8][9][10] and germanium-based [11][12][13][14] Mie resonators, demonstrating that they could outperform their metallic counterpart supporting localized plasmonic resonances. However, the large absorption of group IV semiconductor compounds at short wavelengths induces strong optical losses, limiting their potential applicability as efficient devices especially at blue and near-UV frequencies [15,16] (e.g. at 450 nm: n Si = 4.5, k Si = 0.13; n Ge = 4.0, k Ge = 2.24). Furthermore, with a few exception based on colloids [4,17,18] and solid state dewetting, [13,[19][20][21][22][23] typical nanofabrication methods of Si(Ge)-based Mie resonators rely on top-down technologies that are not easy to scale-up at affordable prices.TiO 2 -based optical devices are an interesting alternative to Si, since Titania has a relatively high refractive index and is fully transparent up to UV frequencies [24,25] (e.g.: at 450 nm: n TiO2 = 2.55, k TiO2 = 1.2 × 10 −5 ; at 370 nm: n TiO2 = 2.83, k TiO2 = 1 × 10 −3 ) rendering it, for instance, a strategic material to manipulate the light emitted by conventional GaN-based blue LEDs (at about 450 nm). TiO 2 can be prepared by high-throughput chemical processes, which is a prerequisite for applications requiring large surface systems. It also has many other advantages over Si and metals that are its high chemical, mechanical, and thermal stability, nontoxicity, and relative natural abundance.To date, several groups have studied the properties of Titania particles as dielectric resonators prepared using conventional top-down microfabrication technologies [26][27][28][29][30] or soft-nanoimprint lithography. [31,32] They all confirmed that electromagnetic resonances could be generated within these metal oxide objects. However, the limited exploitation of this material is mainly due to the difficulty in applying conventional top-down fabrication methods to TiO 2 . Additionally, such approaches do not allow the preparation of spherical resonators, [33] which may be interesting for many applications with effective metamaterials, such as beam steering and back-scattering-free optics, [11,[34][35][36][37][38][39][40][41][42][43][44][45]

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Multifunctional Dielectric Metasurfaces Consisting of Color Holograms Encoded into Color Printed Images

Wen

Cadusch

Meng

et al. 2019

Adv Funct Materials

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A hologram records the wavefront of light from an object, but it is usually not an image itself, and looks unintelligible under diffuse ambient light. Here a new paradigm to encode a color hologram onto a color printed image is experimentally demonstrated. The printed image can be directly viewed under the white light illumination, while a low-crosstalk color holographic image can be seen when the device is illuminated with red (R), green (G), and blue (B) laser beams. The device is a dielectric metasurface that consists of titanium dioxide (TiO 2) cones on a glass substrate. The dimensions of the TiO 2 cones are chosen to allow them to support visible-wavelength resonances, thereby producing the desired reflection spectra and thus the color printed image. The detour phase method is furthermore used to encode the hologram into the metasurface. The approach is conceptually different from previously demonstrated color printed images or holograms and presents opportunities for optical document security and data storage applications.

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All-Dielectric Color Filters Using SiGe-Based Mie Resonator Arrays

Abstract: International audienc

Cited by 89 publications

References 57 publications

Self-assembled antireflection coatings for light trapping based on SiGe random metasurfaces

Self-assembled antireflection coatings for light trapping based on SiGe random metasurfaces

Titania‐Based Spherical Mie Resonators Elaborated by High‐Throughput Aerosol Spray: Single Object Investigation

Multifunctional Dielectric Metasurfaces Consisting of Color Holograms Encoded into Color Printed Images

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