All‐Dielectric Metamaterial Fabrication Techniques

Abstract

region. Basically, all-dielectric metamaterials are composed of polymers, dielectrics, ferrites, or composite materials. [20-22] The unusual electromagnetic properties of all-dielectric metamaterials not only derive from their artificial structure, but also originate directly from the materials, revealing an approach to designing metamaterials with more freedom. [23] Since the initial proposal of all-dielectric metamaterials, various realization mechanisms have been studied and reported. [24-26] The most classical mechanism is based on the so-called Mie-resonance theory, and has been studied extensively. [27-29] In this strategy, dielectric particles with relatively high permittivity are used to generate strong magnetic or electric resonance through electromagnetic wave interaction. Therefore, a negative permeability or permittivity can be produced by the oscillation of the resulting magnetic or electric dipole. This mechanism is simple and versatile, and is generally adopted for the realization of all-dielectric metamaterials with low losses. [30] Ferromagnetic resonance (FMR) theory is another classical realization mechanism for all-dielectric metamaterials. [31,32] When the ferromagnetic resonance of the ferrite takes place, a negative permeability appears. Many factors can influence the FMR of the magnetic materials, including the bias magnetic field, magnetocrystalline anisotropy field, and demagnetization field. Hence, ferrite metamaterials with dual-band, multiband, or tunable properties can be obtained, providing a way to resolve the narrow band problem. Besides, mechanisms such as indefinite media or crystal lattice vibration have also been used to realize all-dielectric metamaterials. [33,34] When determining the realization mechanism for an all-dielectric metamaterial, one crucial factor must be considered: the choice of a fabrication method. Moreover, to achieve different performances, many types of materials with specific electromagnetic properties are used to prepare all-dielectric metamaterials. [35] Hence, researchers have developed various techniques for the fabrication of all-dielectric metamaterials derived from different materials. [36-40] In addition, the fabrication requirements are quite different for all-dielectric metamaterials operating at frequencies ranging from the microwave to optical regions. In particular, the size of the metamaterial unit cell is much smaller than the operational wavelength, making the fabrication technology for all-dielectric metamaterials become the key to their further application. Here, we present a comprehensive review of the various techniques used to produce all-dielectric metamaterials. We review the existing fabrication technologies for microwave, terahertz, and optical all-dielectric All-dielectric metamaterials with low loss are a rapidly developing research hotspot in the field of metamaterials, and offer additional design freedom for electromagnetic devices. Many types of fabrication techniques are used to prepare all-dielectric metamaterials, so as t...

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