All‐Direct Laser Patterning Zinc‐Based Microbatteries

Abstract

Miniature batteries with programmable shape and scalable functions can provide new opportunities in the design of highly compatible integrated circuits and flexible microelectronics. However, achieving these energy supply devices requires the precise formation of highly active electrode materials in a high‐resolution patterned area using appropriate construction protocols. Here, shape‐customizable zinc‐based microbatteries (MBs) using an all‐direct laser patterning (DLP) technique is demonstrated. Unlike conventional processing approaches, the DLP with high spatial‐resolution can not only enable template‐free and efficient arbitrary customizable fabrication of geometry patterns, such as circular, papercut, tropical fish, house shapes, among others, but also spontaneously create oxygen vacancies within micro‐electrode materials that are beneficial to increasing electrochemical active sites. The resultant Zn//MnO2 MBs deliver a high areal capacity of 0.57 mAh cm−2 and an energy density of 0.75 mWh cm−2, surpassing most available aqueous Zn‐based MBs and Li/Na‐based MBs. This strategy can also be extended to other battery systems, such as Zn//Co and Zn//Ag MBs. More importantly, these micro‐batteries are easily integrated into on‐chip electronic systems as built‐in power supply to be highly compatible with multiple sensing functionalities, which showcase accurately monitoring wrist bending, pulse beating, temperature, and moisture signals in humans.

A review of the preparation process and anode stabilization strategies of Zn microbatteries

“…Laser etching [60] , an industrial process employed for metal surface modification, additive manufacturing, and micromachining, offers high-precision processing capabilities, allowing precise control over the structure and size of MBs. Its key advantage lies in rapid processing speed, facilitating quick and effective preparation of MBs electrodes and other devices.…”

Laser-assisted fabrication of a 3D cross-linked V2CTx/rGO microelectrode for high-rate aqueous zinc-ion microbatteries

“…Several researchers have focused on the development of in-plane AZIMBs utilizing metal oxide-based materials, such as vanadium and manganese oxides, as cathode materials, resulting in significant advancements in electrochemical performance. 8–11 However, the energy and power densities of in-plane AZIMBs are insufficient within their given footprint area. Consequently, the emergence of 3D AZIMBs as a potential solution holds promise for significantly enhancing their energy and power densities within a limited area by leveraging the vertical dimension of 3D architectures.…”