The advent of nanophotonic evanescent field trapping and transport platforms has permitted increasingly complex single molecule and single cell studies on-chip. Here, we present the next generation of nanophotonic Standing Wave Array Traps (nSWATs) representing a streamlined CMOS fabrication process and compact biocompatible design. These devices utilize silicon nitride (Si 3 N 4 ) waveguides, operate with a bio-friendly 1064 nm laser, allow for several watts of input power with minimal absorption and heating, and are protected by an anticorrosive layer for sustained on-chip microelectronics in aqueous salt buffers. In addition, due to Si 3 N 4 's negligible nonlinear effects, these devices can generate high stiffness traps while resolving sub-nanometer displacements for each trapped particle. In contrast to traditional table-top counterparts, the stiffness of each trap in an nSWAT device scales linearly with input power and is independent of the number of trapping centers. Through a unique integration of micro-circuitry and photonics, the nSWAT can robustly trap, and controllably position, a large number of nanoparticles along the waveguide surface, operating in an all-optical, constant-force mode without need for active feedback. By reducing device fabrication cost, minimizing trapping laser specimen heating, increasing trapping force, and implementing commonly used trapping techniques, this new generation of nSWATs significantly advances the development of a high performance, low cost optical tweezers array laboratory on-chip.
Graphical Abstract
Author ContributionsThe manuscript was written through contributions of all authors. All authors have given approval to the final version of the manuscript. F.Y. and R.B. designed and fabricated the devices. J.T.I., F.Y., and J.L.K. upgraded the nanophotonics measurement setup and F.Y. carried out measurements. M.S. obtained some preliminary data on some of the experiments. F.Y., R.B, and M.D.W. drafted the manuscript and all authors edited the manuscript. M.D.W. provided overall guidance on experimental designs and measurements.Supporting Information. Fabrication protocol for Si 3 N 4 nSWAT device, Data acquisition and analysis methods, Si 3 N 4 waveguide loss measurement, microheater calibration curve, modulation speed measurement of the Ni microheater, 3D full-wave electromagnetic simulations, kymograph of long range transport of trapped bead array, stiffness measurements using three different methods, spatial resolution measurement of trap movement, cross-talk among different traps, and simultaneous trap stiffness calibration for an array of trapped beads. This material is available free of charge via the Internet at http://pubs.acs.org. Optical trapping utilizes the gradient forces of an electromagnetic field to trap and manipulate small dielectric particles. 1-9 A traditional free-space optical trap is a sensitive tool generated by a tightly focused laser beam using table-top optics. These traps can generate piconewtons (pN) of force and detect nanomete...