All-out fight against yield losses by design-manufacturing collaboration in nano-lithography era

Inoue,; Kobayashi, Kazuya

doi:10.1109/aspdac.2011.5722220

16th Asia and South Pacific Design Automation Conference (ASP-DAC 2011) 2011

DOI: 10.1109/aspdac.2011.5722220

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All-out fight against yield losses by design-manufacturing collaboration in nano-lithography era

Inoue Inoue

Kazuya Kobayashi

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All-out fight against yield losses by design-manufacturing collaboration in nano-lithography era

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References 7 publications

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