2003
DOI: 10.1364/oe.11.002807
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All-silicon optical temperature sensor based on Multi-Mode Interference

Abstract: In this paper we present a novel approach to temperature sensing with optoelectronic devices which relies on the usage of bare silicon as the transducing material. The device is composed by a single mode input waveguide, a MMI region where a number of higher order modes is also allowed to propagate and two output waveguides. The refractive index variation in the MMI section due to temperature shifts induces different phase velocities of the various propagating modes. The position of the input and output wavegu… Show more

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Cited by 78 publications
(38 citation statements)
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“…This problem was also considered by other authors [68]. In the paper [6] there has been proposed an optical temperature sensor based on MMI structures in silicon. Temperature changes cause changes in the refractive index of the interference section.…”
Section: Introductionmentioning
confidence: 93%
“…This problem was also considered by other authors [68]. In the paper [6] there has been proposed an optical temperature sensor based on MMI structures in silicon. Temperature changes cause changes in the refractive index of the interference section.…”
Section: Introductionmentioning
confidence: 93%
“…The Mach-Zehnder interferometer is a device used to determine the relative phase shift between two collimated beams from a coherent light source [9].…”
Section: Mach-zehnder Interferometermentioning
confidence: 99%
“…The analysis of the particular models was based on the numerical BPM method [9,10]. The analysis was focused on concepts where the energy of the excited modes was located principally in the core, and the interaction with the sensor layer was affected mainly through the * corresponding author; e-mail: artur.szewczuk@polsl.pl evanescent field of the modes.…”
Section: Introductionmentioning
confidence: 99%
“…Applications of multimode interference (MMI)structures in waveguide sensor technology have been a subject to research studies of recent years [1][2][3][4][5]. The paper [1] proposes an optical temperature sensor based on MMI structures in silicon.…”
Section: Introductionmentioning
confidence: 99%
“…The paper [1] proposes an optical temperature sensor based on MMI structures in silicon. Temperature changes cause changes in the refractive index of the interference section.…”
Section: Introductionmentioning
confidence: 99%