2016
DOI: 10.1039/c5ra21900k
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AlN-based film buck acoustic resonator operated in shear mode for detection of carcinoembryonic antigens

Abstract: A film buck acoustic resonator (FBAR) operated in shear mode was fabricated and integrated with a microchannel for detection of the carcinoembryonic antigens (CEA).

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Cited by 15 publications
(12 citation statements)
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“…Zheng et al [137] have reported a shear mode film buck acoustic resonator operated with resonant frequency near 1.2 GHz for carcinoembryonic antigens (CEA) detection in liquid environment. The device was fabricated and integrated with a polydimethylsiloxane (PDMS) microchannel.…”
Section: Mechanical Based Biosensors For Chemicals and Pesticidesmentioning
confidence: 99%
“…Zheng et al [137] have reported a shear mode film buck acoustic resonator operated with resonant frequency near 1.2 GHz for carcinoembryonic antigens (CEA) detection in liquid environment. The device was fabricated and integrated with a polydimethylsiloxane (PDMS) microchannel.…”
Section: Mechanical Based Biosensors For Chemicals and Pesticidesmentioning
confidence: 99%
“…The binding ratio for protein G is 10% higher than that of protein A (20.8%), indicating that protein G can immobilize more antibody than protein A and/or provide better antibody orientations. More recently, Zheng et al (Zheng et al 2014;Zheng et al 2016b) have also used AlN-based FBARs to detect the CEA.…”
Section: Fbars As Protein Biosensorsmentioning
confidence: 99%
“…A frequency downward shift of 28 kHz was successfully detected, which is not achievable if the FBAR is not integrated with a microfluidic device. More recently, Zheng at al (Zheng et al 2016b…”
mentioning
confidence: 97%
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“…The thickness shear mode (TSM), whose particle displacement is parallel to the piezoelectric film surface, has a better resonance performance in liquids [ 10 ]. In order to obtain the shear mode resonance, many efforts have been made to grow inclined c -axis–oriented piezoelectric film coupled with two electrodes situated on the opposite sides of the film [ 13 , 14 , 15 ]. This method required complicated equipment and a difficult process to achieve a homogeneous c -axis tilt across the wafer.…”
Section: Introductionmentioning
confidence: 99%