AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors

Development of Temperature Sensor Based on AlN/ScAlN SAW Resonators

“…The frequency change curves of heating and cooling obtained by the wireless measurement method are shown in Figure 11a. The heating curve and the cooling curve were respectively fitted to obtain the fitting curve and Equation (9). The relationship between temperature and frequency measured by the wireless test system is shown in Equation (9).…”

“…The heating curve and the cooling curve were respectively fitted to obtain the fitting curve and Equation (9). The relationship between temperature and frequency measured by the wireless test system is shown in Equation (9). From the results, we can see the sensitivity of the sensor was −29.3 ppm/°C.…”

“…With the rapid development of the internet of things (IoT) technology, higher requirements are being put forward for sensing technology [1]. As a kind of acoustic wave device based on piezoelectric materials, surface acoustic wave sensors have become major research objects due to their quick response, high sensitivity, and ability of wireless measurement [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16].…”

“…In sensing applications, temperature sensors have become an essential tool in many fields, such as chemical, machinery, etc. [2][3][4][5][6] As temperature sensors, SAW resonators can be used not only for wired measurements [7][8][9][10], but also wireless measurements in extreme environments [2,3,5,11,12,[14][15][16]. The wired sensor has a stable signal output and strong anti-interference ability, but a wired connection makes it impossible to apply to situations involving fast movement or with high sealing performance requirements.…”