Alteration and Interrogation of Ultra-Thin Layer of Silicon by Reactive Molecular Ion Implantation

Mukherjee, Joy; Bhowmick, Sudip; Karmakar, S. N.; Bhowmik, Dipak; Satpati, Biswarup; Hazra, S.; Karmakar, Prasanta

doi:10.2139/ssrn.4356098

2023

DOI: 10.2139/ssrn.4356098

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Alteration and Interrogation of Ultra-Thin Layer of Silicon by Reactive Molecular Ion Implantation

Joy Mukherjee¹,

Sudip Bhowmick²,

S. N. Karmakar³

et al.

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Alteration and Interrogation of Ultra-Thin Layer of Silicon by Reactive Molecular Ion Implantation

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