Hyperbolic
metamaterials (HMMs) with extreme dielectric anisotropy
have shown great promise in nanophotonic applications such as superlensing,
enhancement of spontaneous emission, negative refraction, and the
diverging photonic density of states. Noble metal-based metal/dielectric
multilayers (e.g., Au/SiO2 and Ag/TiO2) and
metallic (Au and Ag) nanowires embedded inside a dielectric matrix
have been traditionally used to demonstrate HMM properties and for
implementations into devices. Noble metals are, however, unstable
at high temperatures, complementary metal oxide semiconductor incompatible,
and difficult to deposit in thin-film form due to their high surface
energies that limit their potential applications. TiN has emerged
as an alternative plasmonic material to Au in recent years, and epitaxial
TiN/Al0.72Sc0.28N metal/semiconductor superlattices
were developed that exhibit excellent HMM properties. As TiN exhibits
ε-near-zero (ENZ) at ∼500 nm, TiN/Al0.72Sc0.28N HMM also operates from ∼500 nm to long-wavelength
regions. However, for several energy-conversion-related applications
as well as for fundamental studies, it is desirable to achieve HMM
wavelengths from the near-UV to the near-IR region of the spectrum.
In this article, we demonstrate hyperbolic photonic dispersion in
(Hf,Zr)N/ScN, a class of metal/semiconducting superlattice metamaterial
that covers the near-UV to the near-IR spectral range. Epitaxial HfN/ScN,
ZrN/ScN, and Hf0.5Zr0.5N/ScN superlattices are
deposited on (001) MgO substrates and characterized with synchrotron-radiation
X-ray diffraction as well as high-resolution electron microscopy techniques.
Superlattices grow with cube-on-cube epitaxy and with sharp interfaces.
Optical characterization reveals both type-I and type-II hyperbolic
photonic dispersions as well as low losses and high figures-of-merit.
Along with its high-temperature thermal stability, demonstration of
HMM properties in (Hf,Zr)N/ScN metal/dielectric superlattices makes
them potential candidates for HMM devices.