Aluminium thin films depth profiling using LIBS

Abstract

Laser Induced Breakdown Spectroscopy (LIBS) is an analytical technique used to classify and potentially quantify elements in complex hosts (or matrices) [1,2]. In this study, silicon based aluminium thin films were developed to study the depth profile and ablation rate of the material. Five films with different thicknesses from 1mm to 1.5 micron were used. The experimental setup consisted of s single pulse system with a Nd:YAG laser (1064 nm, up to 450 mJ, pulse duration 6 ns) used to irradiate the samples, an optic fibre spectrometer was used to detect the spectrum. The results show low ablation rate with time integrated method.