2013
DOI: 10.1007/s11148-013-9534-6
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Aluminum nitride. Preparation methods (Review)

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Cited by 21 publications
(16 citation statements)
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“…Thermodynamic Analysis of a New Gas-Phase Method of Obtaining High-Purity Aluminum Nitride 99 Two parameters determine the equilibrium conditions for the direct nitriding of aluminum in the gaseous state in accordance with reaction (4). The values of the equilibrium constants K e = P N2 ·P Al will depend either on the temperature and the total pressure of the gas phase for a given composition of gas phase or on temperature and gas-phase composition when total pressure in the reaction zone is constant.…”
Section: Methodsmentioning
confidence: 99%
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“…Thermodynamic Analysis of a New Gas-Phase Method of Obtaining High-Purity Aluminum Nitride 99 Two parameters determine the equilibrium conditions for the direct nitriding of aluminum in the gaseous state in accordance with reaction (4). The values of the equilibrium constants K e = P N2 ·P Al will depend either on the temperature and the total pressure of the gas phase for a given composition of gas phase or on temperature and gas-phase composition when total pressure in the reaction zone is constant.…”
Section: Methodsmentioning
confidence: 99%
“…For reaction (4), the equilibrium conditions are described by the equation K e = 1/(P(N 2 )·P 2 (Al) and depend on two parameters.…”
Section: Methodsmentioning
confidence: 99%
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“…However no method exists providing industrial preparation of high-purity aluminium nitride [4,5]. A number of works [4 -7] consider new promising gas-phase synthesis of aluminium nitride.…”
Section: Introductionmentioning
confidence: 99%