Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

Kabulski, A.; Pagán, V. R.; Cortés, Daniel H.; Burda, R.; Mukdadi, Osama M.; Korakakis, D.

doi:10.1557/proc-1139-gg03-47

Materials Research Society Symposium Proceedings 2008

DOI: 10.1557/proc-1139-gg03-47

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Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

A. Kabulski¹,

V. R. Pagán²,

Daniel H. Cortés³

et al.

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Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

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