2000
DOI: 10.1134/1.1262905
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Amorphization of the subsurface regions in ion-implanted alloys

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Cited by 8 publications
(6 citation statements)
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“…Regardless of the study of emission properties, the bombardment of surfaces by low-energy (up to keV units) atoms and ions with the aim of cleaning them, ion etching, etc is a widely used technological method. The information on the state of surfaces, subjected to ion bombardment accumulated up to date (see, for example, [31][32][33][34] and the literature cited there), allows us to conclude that with low-energy bombardment the surface is modified to a depth of tens of atomic layers. Thus, when a tungsten surface is bombarded with helium ions with an average energy of w i ≈ 150 eV and a current of 0.3-0.4 μA at a total dose of 10 18 ion cm −2 , the concentration of helium atoms in the surface layer reaches tens of the percent of the tungsten atoms concentration [35].…”
Section: Electron Emission From Cold Cathodes In a Gas Dischargementioning
confidence: 99%
“…Regardless of the study of emission properties, the bombardment of surfaces by low-energy (up to keV units) atoms and ions with the aim of cleaning them, ion etching, etc is a widely used technological method. The information on the state of surfaces, subjected to ion bombardment accumulated up to date (see, for example, [31][32][33][34] and the literature cited there), allows us to conclude that with low-energy bombardment the surface is modified to a depth of tens of atomic layers. Thus, when a tungsten surface is bombarded with helium ions with an average energy of w i ≈ 150 eV and a current of 0.3-0.4 μA at a total dose of 10 18 ion cm −2 , the concentration of helium atoms in the surface layer reaches tens of the percent of the tungsten atoms concentration [35].…”
Section: Electron Emission From Cold Cathodes In a Gas Dischargementioning
confidence: 99%
“…Experimental studies of changes in the metal and alloy structure after radiation exposure [1][2][3][4][5][6] showed that interaction between accelerated charged ions and the substance initiates formation of amorphous, nanomicrocrystalline, and submicrocrystalline states in the subsurface regions.…”
Section: Introductionmentioning
confidence: 99%
“…Experimental studies of changes in the metal and alloy structure after radiation exposure [1][2][3][4][5][6] showed that interaction between accelerated charged ions and the substance initiates formation of amorphous, nano and submicrocrystalline states in the subsurface regions.…”
Section: Introductionmentioning
confidence: 99%