This paper describes partially fluorinated poly-p-xylylenes prepared by CVD polymerization. The synthesis, characterization, and surface modification of two partially fluorinated polymer coatings, namely poly(4,12-dibromo-1,1,9,9-tetrafluoro-pxylylene) (2) and poly(4-heptadecafluorononanoyl-p-xylylene-co-p-xylylene) (4), is described. Polymer 2 is synthesized from 4,12-dibromo-1,1,9,9-tetrafluoro[2.2]paracyclophane (1), which is fluorinated at the aliphatic bridge, while 4-heptadecafluorononanoyl[2.2]paracyclophane (3), which contains a perfluorinated keto group at the aromatic ring, is used to synthesize polymer 4. Furthermore, the keto-functionalized polymer 4 introduces both extreme hydrophobicity and surface reactivity towards hydrazide-containing ligands.