Amorphous Pd-assisted H2 detection of ZnO nanorod gas sensor with enhanced sensitivity and stability

Kim, Hyeonghun; Pak, Yusin; Jeong, Young Kyu; Kim, Woochul; Kim, Jeong‐Nam; Jung, Gun Young

doi:10.1016/j.snb.2018.02.025

Cited by 122 publications

(45 citation statements)

References 60 publications

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“…These SMON sensing materials mainly include ZnO, 31,32 CuO, [33][34][35][36] SnO 2 , 37-39 TiO 2 , 40,41 Fe 2 O 3 , 42,43 In 2 O 3 , 44-47 Co 3 O 4 48-50 and WO 3 . 18,51 For further improvement of sensing performance, they have been modified using noble metals, [52][53][54][55] metal ions, [56][57][58][59][60] and carbon materials. [61][62][63][64] Composites of multi-phase SMONs [65][66][67] have also been frequently reported.…”

Section: Introductionmentioning

confidence: 99%

Advances in designs and mechanisms of semiconducting metal oxide nanostructures for high-precision gas sensors operated at room temperature

et al. 2019

Mater. Horiz.

592

328

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Section: Introductionmentioning

confidence: 99%

Advances in designs and mechanisms of semiconducting metal oxide nanostructures for high-precision gas sensors operated at room temperature

et al. 2019

Mater. Horiz.

592

328

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“…1 Various methods and technologies have been applied to synthesize ZnO nanorods, such as thermal evaporation, 2 laser ablation, 3 chemical vapor deposition, 4 arc plasma reaction, 5 and solution methods. 6 Moreover, to achieve an enhanced sensing performance of ZnO nanorods, numerous materials have been applied as coatings on the surface of ZnO nanorod gas sensors, like Pd, 7 InSb, 8 Ni, 9 etc.…”

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confidence: 99%

Improved Gas Sensing Performance of ALD AZO 3-D Coated ZnO Nanorods

Lin

Chen

Zhang

et al. 2018

ECS J. Solid State Sci. Technol.

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This paper reports an enhancement on the sensing performance of ZnO nanorod ethanol sensors with a new approach by utilizing nested coatings of Aluminum doped ZnO (AZO) thin films by Atomic Layer Deposition (ALD) technology. ZnO nanorods were grown by the hydrothermal method with the ZnO seed layer synthesized on Silicon wafers by ALD. To enhance the sensing performance of ZnO nanorod ethanol sensors, multiple coated AZO thin film 3-D coatings were deposited on the surface of the intrinsic ZnO nanorods by ALD. To investigate the sensing performance of the ZnO nanorods sensor for the detection of ethanol vapor, a gas sensor testing system was designed and built with a sealed reaction chamber and a temperature controller. The demonstrated sensing performance results include the sensing response comparison between ZnO nanorods before and after ALD coatings with AZO films at different temperatures and with various concentrations of input ethanol vapor. The response times and recovery times of ZnO nanorods before and after ALD coatings with AZO thin films were analyzed to investigate the sensing enhancement. The sensing response improvement peaks at 25 • C room temperature with approximately 200% enhancement. However, the sensing response improvement decreases as a function of increasing operating temperature.

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“…However, room temperature‐operated H 2 gas sensors were demonstrated with a high selectivity toward H 2 gas by using a thin Pd catalytic layer on top of zinc oxide nanowires surface . In our previous work, we found that a 1 nm thick Pd layer was composed of many tiny Pd islands on an IGZO surface and dramatically enhanced H 2 gas detection at room temperature .…”

Section: Resultsmentioning

confidence: 99%

“…[51] In our previous work, we found that a 1 nm thick Pd layer was composed of many tiny Pd islands on an IGZO surface and dramatically enhanced H 2 gas detection at room temperature. [51] In our previous work, we found that a 1 nm thick Pd layer was composed of many tiny Pd islands on an IGZO surface and dramatically enhanced H 2 gas detection at room temperature.…”

Section: Igzo-based H 2 Sensors On the Pmma Substrate And Their Bendimentioning

confidence: 93%

Extremely Flexible Indium‐Gallium‐Zinc Oxide (IGZO) Based Electronic Devices Placed on an Ultrathin Poly(Methyl Methacrylate) (PMMA) Substrate

Kumaresan

Lee

Lim

et al. 2018

Adv Elect Materials

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deformation is highly recommended for wearable electronics placed on any textile products and/or hand gloves. [20,21] In general, the substrate having the electronic devices plays an important role in their flexibility. To date, polyimide (PI) has been widely utilized as a flexible substrate due to its excellent dielectric property, and good chemical and thermal stability. [22][23][24][25][26][27] However, commercially available PI is not transparent, which limits its use in display applications, and conformal contact of PI substrate onto nonplanar surfaces such as gloves, flexible poly(vinyl chloride) (PVC) tubes, or cotton by using a glue is impractical.To attain both high flexibility and conformal contact of electronic devices, researchers have designed free-standing organic devices, in which a polymer dielectric layer (e.g., polystyrene, polyacrylonitrile, polylactide) or organic active layer (e.g., pentacene) itself acts as a substrate. [28][29][30][31] Zhang et al. fabricated freestanding pentacene field effect transistors (FETs) by utilizing a polyacrylonitrile dielectric layer to hold the device components and attached it onto rough or even sharp substrates. [32] However, as semiconducting polymers are not stable under atmospheric conditions, [33,34] metal oxide-based electronic devices [35][36][37] using thin inorganic semiconductor layers, such as SnO 2 , ZnO, In-Ga-ZnO, MoO 3 , and TiO 2 , are utilized; however, the thin metal oxide layers cannot endure physical strain greater than 1%, while being bent and twisted. [38] In fact, the physical strain (S) acting on the thin metal oxide layer while being bent can be controlled by substrate thickness, which is determined by a simple formula S = d/2r ("d" is the substrate thickness, and "r" is the bending radius).Therefore, metal oxide-based electronic devices placed on top of an ultrathin organic substrate have been pursued to have less physical strain for ultraflexibility. [39][40][41][42][43] Han et al. engineered a foldable indium tin oxide (ITO)-coated glass platform composed of thick and nondeformable parts surrounded by thin and foldable glass, which was selectively etched down to 5 µm, and successfully obtained a foldable substrate without any device failure. [39] Hassan et al. utilized a thin Al 2 O 3 substrate to fabricate flexible metal oxide-based H 2 sensors. [40] Kim et al. fabricated In-Ga-ZnO TFTs on a 1.5 µm thick polyimide substrate and demonstrated its bendability at a bending radius down to 0.25 mm. [41] The flexibility of metal oxide-based electronic devices is severely limited by the thickness of their substrate. To enhance the flexibility of semiconducting metal oxide-based electronic devices, a new and simple way to fabricate indium-gallium-zinc oxide (IGZO)-based electronic devices on an ultrathin (1.9 µm) poly(methyl methacrylate) (PMMA) substrate is introduced. The PMMA layer spin-coated on an unmodified glass slide has no chemical interactions at the interface, resulting in weak adhesion. Therefore, the PMMA layer with the devices...

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Amorphous Pd-assisted H2 detection of ZnO nanorod gas sensor with enhanced sensitivity and stability

Abstract: J, et al. (2018) Amorphous Pdassisted H 2 detection of ZnO nanorod gas sensor with enhanced sensitivity and stability. Sensors and Actuators B: Chemical.

Cited by 122 publications

References 60 publications

Advances in designs and mechanisms of semiconducting metal oxide nanostructures for high-precision gas sensors operated at room temperature

Advances in designs and mechanisms of semiconducting metal oxide nanostructures for high-precision gas sensors operated at room temperature

Improved Gas Sensing Performance of ALD AZO 3-D Coated ZnO Nanorods

Extremely Flexible Indium‐Gallium‐Zinc Oxide (IGZO) Based Electronic Devices Placed on an Ultrathin Poly(Methyl Methacrylate) (PMMA) Substrate

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