Crystalline and Non-Crystalline Solids 2016
DOI: 10.5772/63522
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Amorphous, Polymorphous, and Microcrystalline Silicon Thin Films Deposited by Plasma at Low Temperatures

Abstract: The present chapter is devoted to the study of amorphous (a-Si:H), polymorphous (pmSi:H), and microcrystalline (μc-Si:H) silicon, deposited by the plasma-enhanced chemical vapor deposition (PECVD) technique at low temperatures. We have studied the main deposition parameters that have strong influence on the optical, electrical, and structural properties of the polymorphous and microcrystalline materials. Our results reveal the key deposition conditions for obtained films with optical and electrical characteris… Show more

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Cited by 7 publications
(3 citation statements)
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“…The optical band gap energy was calculated using Tauc's relation [Eq. ]: [49] true(αhv)n=normalA4pt(hv-Enormalg) …”
Section: Resultsmentioning
confidence: 99%
“…The optical band gap energy was calculated using Tauc's relation [Eq. ]: [49] true(αhv)n=normalA4pt(hv-Enormalg) …”
Section: Resultsmentioning
confidence: 99%
“…It is worth noting that the clear energy separation of the two peak groups is crucial to get separate information about the coating and the underneath films, even at the photon energy (1400 eV) used in this work when compared with High photon energy photoemission (HAXPES) measurements performed at 3, 5, 8 KeV [15]. To single out the a-Si:H film components, we performed a fit of the spectra by the KolXPD code [25]. The baseline of the Si2p is fitted with a set of Voigt doublets with Si2p 3/2 -Si2p 1/2 spin-orbit splitting of 0.6 eV and the gaussian contribution that includes the energy resolution and the disorder.…”
Section: Si2p Core Level Photoemissionmentioning
confidence: 99%
“…The fabrication of the C 6 H 11 CH 3 =a-Si:H=Ce:YIG=GCGMZG magnetooptic waveguide can be easily achieved by plasma-enhanced chemical vapor deposition (PECVD). 29,32)…”
Section: Temperature Dependencementioning
confidence: 99%