1994
DOI: 10.1116/1.579284
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Amorphous Si:B films: Microstructure and electrical properties

Abstract: A theoretical study of the electronic structure and spectroscopic properties of the low-lying electronic states of the molecule SiBThe properties of and potential uses for thin films of amorphous Si:B alloys are summarized. The films were deposited by low-pressure chemical vapor deposition of silane and dihorane. The boron content of the samples was controlled by regulating the reaction of diborane and silane gases during the deposition. The alloy and its oxides possess many desirable properties for microelect… Show more

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