Amorphous silicon for the application in integrated optics

Harke, A.

doi:10.15480/882.781

2010

DOI: 10.15480/882.781

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Amorphous silicon for the application in integrated optics

A. Harke¹

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2013

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Cited by 1 publication

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Multi-stacked silicon wire waveguides and couplers toward 3D optical interconnects

et al. 2013

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The relationship between the propagation loss and roughness on multi-layered Si waveguides fabricated up to a 3 rd layer was investigated. By reducing the surface and sidewall roughness of the waveguides, a low propagation loss of 3.7 dB/cm for the 3 layer a-Si:H waveguides was demonstrated. Furthermore, vertical coupling between multilayer waveguides was demonstrated by use of a grating-type vertical coupler. A coupling efficiency of 22% was obtained for 10 pairs of gratings with a period of 640 nm, even with a layer distance of 1µm.

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Multi-stacked silicon wire waveguides and couplers toward 3D optical interconnects

et al. 2013

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Amorphous silicon for the application in integrated optics

Cited by 1 publication

References 110 publications

Multi-stacked silicon wire waveguides and couplers toward 3D optical interconnects

Multi-stacked silicon wire waveguides and couplers toward 3D optical interconnects

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