2016
DOI: 10.1016/j.sna.2016.06.026
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An accelerometer with integrative intensity-modulated optical encoder and patterned leaf spring for low-frequency vibration monitoring

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Cited by 10 publications
(5 citation statements)
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“…Back in the 1950s, optical linear encoders began to be adopted in machine tools for direct position feedback [ 2 ]. Today, optical encoders are widely used in numerous applications where position measurements are vital to controls, from printers in households [ 3 ] to industrial robot arms [ 4 ], high-end 3D printers [ 5 ], accelerometers [ 6 ], high-end medical instruments, such as MRI [ 7 ], and wafer scanners in the semiconductor industry [ 8 ]. The resolutions of optical linear encoders should be at least 10 times finer than the accuracy of the designed machines so that control accuracy can be ensured [ 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…Back in the 1950s, optical linear encoders began to be adopted in machine tools for direct position feedback [ 2 ]. Today, optical encoders are widely used in numerous applications where position measurements are vital to controls, from printers in households [ 3 ] to industrial robot arms [ 4 ], high-end 3D printers [ 5 ], accelerometers [ 6 ], high-end medical instruments, such as MRI [ 7 ], and wafer scanners in the semiconductor industry [ 8 ]. The resolutions of optical linear encoders should be at least 10 times finer than the accuracy of the designed machines so that control accuracy can be ensured [ 9 ].…”
Section: Introductionmentioning
confidence: 99%
“…The timely and accurate analysis of deterioration factors inside civil constructions can provide prompt solutions and prevent accidental destruction [5][6][7][8]. Several computation methods and experimental schemes of vibration sensing devices have been proposed, including laser Doppler vibrometers [9][10][11] and fiber optics-based sensors [12][13][14][15][16][17][18][19][20]. Laser vibrometers 1289 (2023) 012036 IOP Publishing doi:10.1088/1757-899X/1289/1/012036 2 are unstable as their operation is susceptible to the vibration of their locations, leading to significant measurement uncertainty, and they are vulnerable to environmental factors.…”
Section: Introductionmentioning
confidence: 99%
“…The striking feature of these techniques is the fact that they employ laser-based devices. Particularly, they can be laser Doppler vibrometers [6][7][8] or fiber opticsbased sensors [9][10][11]. Nevertheless, in this case, the device is demonstrated not to be very susceptible to the vibration of the construction where they are located.…”
Section: Introductionmentioning
confidence: 99%